Configuring AVM as a MES componConfiguring AVM as a MES component

Fan-Tien Cheng, Jonathan Yung Cheng Chang, Chi An Kao, Ying Lin Chen, Ju Lei Peng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A typical 65nm manufacturing process normally contains 400-500 process steps. Many factors in production line could cause production quality shift and/or drift. Especially, when a new process to include more functions in a die is under development, a higher failure rate will be encountered. As a result, frequent monitoring in both tool and process is required to detect the quality issue early so as to improve the process stability of semiconductor manufacturing. However, more tool and process monitoring means more metrology operation cost and longer cycle time. Recently, a promising technology denoted virtual metrology (VM) is blooming. VM can convert sampling inspection with metrology delay into real-time and on-line total inspection. Therefore, VM has now been designated by International SEMATECH Manufacturing Initiative (ISMI) and International Technology Roadmap for Semiconductors (ITRS) as one of the focus areas for the next generation factory realization roadmap of the semiconductor industry. The authors have developed the so-called automatic virtual metrology (AVM) system to implement and deploy the VM operations automatically. This paper proposes a novel manufacturing system that integrates AVM into the manufacturing execution system (MES). The interfaces among AVM, other MES components, and R2R (run-to-run) modules in the novel manufacturing system are also defined such that the capabilities of AVM can be accomplished. The AVM capabilities include 1) converting sampling inspection with metrology delay into real-time and on-line total inspection; 2) control/monitoring workpieces reduction/elimination; and 3) supporting wafer-to-wafer (W2W) advanced process control.

Original languageEnglish
Title of host publication2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2010
Pages226-231
Number of pages6
DOIs
Publication statusPublished - 2010 Oct 11
Event2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2010 - San Francisco, CA, United States
Duration: 2010 Jul 112010 Jul 13

Publication series

NameASMC (Advanced Semiconductor Manufacturing Conference) Proceedings
ISSN (Print)1078-8743

Other

Other2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2010
CountryUnited States
CitySan Francisco, CA
Period10-07-1110-07-13

Fingerprint

Inspection
Semiconductor materials
Sampling
Monitoring
Process monitoring
Process control
Industrial plants
Costs
Industry

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

Cheng, F-T., Chang, J. Y. C., Kao, C. A., Chen, Y. L., & Peng, J. L. (2010). Configuring AVM as a MES componConfiguring AVM as a MES component. In 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2010 (pp. 226-231). [5551454] (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings). https://doi.org/10.1109/ASMC.2010.5551454
Cheng, Fan-Tien ; Chang, Jonathan Yung Cheng ; Kao, Chi An ; Chen, Ying Lin ; Peng, Ju Lei. / Configuring AVM as a MES componConfiguring AVM as a MES component. 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2010. 2010. pp. 226-231 (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings).
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Cheng, F-T, Chang, JYC, Kao, CA, Chen, YL & Peng, JL 2010, Configuring AVM as a MES componConfiguring AVM as a MES component. in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2010., 5551454, ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, pp. 226-231, 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2010, San Francisco, CA, United States, 10-07-11. https://doi.org/10.1109/ASMC.2010.5551454

Configuring AVM as a MES componConfiguring AVM as a MES component. / Cheng, Fan-Tien; Chang, Jonathan Yung Cheng; Kao, Chi An; Chen, Ying Lin; Peng, Ju Lei.

2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2010. 2010. p. 226-231 5551454 (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Cheng F-T, Chang JYC, Kao CA, Chen YL, Peng JL. Configuring AVM as a MES componConfiguring AVM as a MES component. In 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2010. 2010. p. 226-231. 5551454. (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings). https://doi.org/10.1109/ASMC.2010.5551454