Contact photolithography at sub-micrometer scale using a soft photomask

Research output: Contribution to journalArticle

Abstract

This paper proposes a method for improving the patterning resolution of conventional contact photolithography from the micrometer, down to the sub-micrometer scale. The key element is a soft polydimethylsiloxane (PDMS) photomask, which is first replicated from a silicon mold and then patterned with a black photoresist (PR) layer to selectively block ultraviolet (UV) light. This soft PDMS photomask can easily form an intimate and conformable contact with a PR-coated substrate and hence can perform contact photolithography with high pattern resolution. The fabrication processes of this black-PR/PDMS soft photomask are experimentally carried out. Using the fabricated soft photomask, UV patterning by contact photolithography with the smallest line-width of 170 nm over a 4" wafer area was successfully achieved. The advantages and potentials of this new type of contact photolithography will be addressed.

Original languageEnglish
Article number547
JournalMicromachines
Volume10
Issue number8
DOIs
Publication statusPublished - 2019 Aug 1

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Photomasks
Photolithography
Polydimethylsiloxane
Photoresists
Linewidth
Fabrication
Silicon
Substrates

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

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abstract = "This paper proposes a method for improving the patterning resolution of conventional contact photolithography from the micrometer, down to the sub-micrometer scale. The key element is a soft polydimethylsiloxane (PDMS) photomask, which is first replicated from a silicon mold and then patterned with a black photoresist (PR) layer to selectively block ultraviolet (UV) light. This soft PDMS photomask can easily form an intimate and conformable contact with a PR-coated substrate and hence can perform contact photolithography with high pattern resolution. The fabrication processes of this black-PR/PDMS soft photomask are experimentally carried out. Using the fabricated soft photomask, UV patterning by contact photolithography with the smallest line-width of 170 nm over a 4{"} wafer area was successfully achieved. The advantages and potentials of this new type of contact photolithography will be addressed.",
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Contact photolithography at sub-micrometer scale using a soft photomask. / Wu, Chun Ying; Hsieh, Heng; Lee, Yung Chun.

In: Micromachines, Vol. 10, No. 8, 547, 01.08.2019.

Research output: Contribution to journalArticle

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