Contact printing for direct metallic pattern transfer based on pulsed infrared laser heating

Chun Hung Chen, Yung Chun Lee

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for the subsequent etching on the substrate. The potential for applying this method to nano-patterning and nano-fabrication is addressed.

Original languageEnglish
Article number006
Pages (from-to)1252-1256
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume17
Issue number7
DOIs
Publication statusPublished - 2007 Jul 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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