Contour controller design for two-dimensional stage system with friction

C. Hsieh, K. C. Lin, C. L. Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

For multiple-axis stages, it is required to operate the axes simultaneously, such that the resulting trajectory of platform follows a given contour. For most stage systems, friction acts as the major disturbance which degrades the precision of system motion and its effect should be compensated. In this paper, contouring control of a two-dimensional stage system subjected to friction is investigated. A systematic contour controller design based on task coordinate frame is proposed and its effectiveness is studied through theoretical analysis and numerical simulations.

Original languageEnglish
Title of host publicationProgress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
PublisherTrans Tech Publications Ltd
Pages1267-1272
Number of pages6
EditionPART 2
ISBN (Print)0878499903, 9780878499908
DOIs
Publication statusPublished - 2006
Event2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan
Duration: 2005 Nov 282005 Dec 2

Publication series

NameMaterials Science Forum
NumberPART 2
Volume505-507
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Other

Other2005 International Conference on Advanced Manufacture, ICAM2005
CountryTaiwan
CityTaipei, R.O.C.
Period05-11-2805-12-02

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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