TY - GEN
T1 - Contour controller design for two-dimensional stage system with friction
AU - Hsieh, C.
AU - Lin, K. C.
AU - Chen, C. L.
PY - 2006
Y1 - 2006
N2 - For multiple-axis stages, it is required to operate the axes simultaneously, such that the resulting trajectory of platform follows a given contour. For most stage systems, friction acts as the major disturbance which degrades the precision of system motion and its effect should be compensated. In this paper, contouring control of a two-dimensional stage system subjected to friction is investigated. A systematic contour controller design based on task coordinate frame is proposed and its effectiveness is studied through theoretical analysis and numerical simulations.
AB - For multiple-axis stages, it is required to operate the axes simultaneously, such that the resulting trajectory of platform follows a given contour. For most stage systems, friction acts as the major disturbance which degrades the precision of system motion and its effect should be compensated. In this paper, contouring control of a two-dimensional stage system subjected to friction is investigated. A systematic contour controller design based on task coordinate frame is proposed and its effectiveness is studied through theoretical analysis and numerical simulations.
UR - http://www.scopus.com/inward/record.url?scp=35348871307&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=35348871307&partnerID=8YFLogxK
U2 - 10.4028/0-87849-990-3.1267
DO - 10.4028/0-87849-990-3.1267
M3 - Conference contribution
AN - SCOPUS:35348871307
SN - 0878499903
SN - 9780878499908
T3 - Materials Science Forum
SP - 1267
EP - 1272
BT - Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
PB - Trans Tech Publications Ltd
T2 - 2005 International Conference on Advanced Manufacture, ICAM2005
Y2 - 28 November 2005 through 2 December 2005
ER -