Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator

Chun Ming Wen, Ming-Yang Cheng, Ke Han Su

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In industrial precision applications using dual-axis micro-positioning stages powered by piezoelectric actuators (PEA), the trajectory tracking and contour following performances are limited due to PEA's inherent hysteretic nonlinearity and time varying parameters. In order to cope with this problem, a position control scheme based on reinforcement learning cerebellar model articulation controller (RLCMAC) is developed in this paper. In the proposed control scheme, for each individual-axis, a CMAC-based feedforward controller with reinforcement learning scheme and a conventional proportional-integral (PI) feedback controller are used. Moreover, in order to reduce contour errors, a CMAC-based cross-coupled controller (CMAC-CCC) is applied to improve the contouring accuracy of a dual-axis micro-positioning stage. Finally, an integrated control scheme is proposed to improve the tracking and contouring accuracy. Experimental results verify the effectiveness of the proposed approach.

Original languageEnglish
Title of host publicationAMC2010 - The 11th IEEE International Workshop on Advanced Motion Control, Proceedings
Pages82-87
Number of pages6
DOIs
Publication statusPublished - 2010 Jun 25
Event2010 11th IEEE International Workshop on Advanced Motion Control, AMC2010 - Nagaoka, Niigata, Japan
Duration: 2010 Mar 212010 Mar 24

Publication series

NameInternational Workshop on Advanced Motion Control, AMC

Other

Other2010 11th IEEE International Workshop on Advanced Motion Control, AMC2010
CountryJapan
CityNagaoka, Niigata
Period10-03-2110-03-24

Fingerprint

Piezoelectric Actuator
Piezoelectric actuators
Positioning
Controller
Controllers
Reinforcement learning
Reinforcement Learning
Integrated control
Time-varying Parameters
Position Control
Trajectory Tracking
Position control
Feedforward
Directly proportional
Trajectories
Nonlinearity
Verify
Feedback
Experimental Results

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Modelling and Simulation
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Wen, C. M., Cheng, M-Y., & Su, K. H. (2010). Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator. In AMC2010 - The 11th IEEE International Workshop on Advanced Motion Control, Proceedings (pp. 82-87). [5464019] (International Workshop on Advanced Motion Control, AMC). https://doi.org/10.1109/AMC.2010.5464019
Wen, Chun Ming ; Cheng, Ming-Yang ; Su, Ke Han. / Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator. AMC2010 - The 11th IEEE International Workshop on Advanced Motion Control, Proceedings. 2010. pp. 82-87 (International Workshop on Advanced Motion Control, AMC).
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Wen, CM, Cheng, M-Y & Su, KH 2010, Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator. in AMC2010 - The 11th IEEE International Workshop on Advanced Motion Control, Proceedings., 5464019, International Workshop on Advanced Motion Control, AMC, pp. 82-87, 2010 11th IEEE International Workshop on Advanced Motion Control, AMC2010, Nagaoka, Niigata, Japan, 10-03-21. https://doi.org/10.1109/AMC.2010.5464019

Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator. / Wen, Chun Ming; Cheng, Ming-Yang; Su, Ke Han.

AMC2010 - The 11th IEEE International Workshop on Advanced Motion Control, Proceedings. 2010. p. 82-87 5464019 (International Workshop on Advanced Motion Control, AMC).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Wen CM, Cheng M-Y, Su KH. Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator. In AMC2010 - The 11th IEEE International Workshop on Advanced Motion Control, Proceedings. 2010. p. 82-87. 5464019. (International Workshop on Advanced Motion Control, AMC). https://doi.org/10.1109/AMC.2010.5464019