Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator

Chun Ming Wen; Ming-Yang Cheng; Ke Han Su

doi:10.1109/AMC.2010.5464019

Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator

Chun Ming Wen
, Ming-Yang Cheng
, Ke Han Su

Department of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In industrial precision applications using dual-axis micro-positioning stages powered by piezoelectric actuators (PEA), the trajectory tracking and contour following performances are limited due to PEA's inherent hysteretic nonlinearity and time varying parameters. In order to cope with this problem, a position control scheme based on reinforcement learning cerebellar model articulation controller (RLCMAC) is developed in this paper. In the proposed control scheme, for each individual-axis, a CMAC-based feedforward controller with reinforcement learning scheme and a conventional proportional-integral (PI) feedback controller are used. Moreover, in order to reduce contour errors, a CMAC-based cross-coupled controller (CMAC-CCC) is applied to improve the contouring accuracy of a dual-axis micro-positioning stage. Finally, an integrated control scheme is proposed to improve the tracking and contouring accuracy. Experimental results verify the effectiveness of the proposed approach.

Original language	English
Title of host publication	AMC2010 - The 11th IEEE International Workshop on Advanced Motion Control, Proceedings
Pages	82-87
Number of pages	6
DOIs	https://doi.org/10.1109/AMC.2010.5464019
Publication status	Published - 2010 Jun 25
Event	2010 11th IEEE International Workshop on Advanced Motion Control, AMC2010 - Nagaoka, Niigata, Japan Duration: 2010 Mar 21 → 2010 Mar 24

Publication series

Name	International Workshop on Advanced Motion Control, AMC

Other

Other	2010 11th IEEE International Workshop on Advanced Motion Control, AMC2010
Country/Territory	Japan
City	Nagaoka, Niigata
Period	10-03-21 → 10-03-24

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 2 Zero Hunger

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Modelling and Simulation
Computer Science Applications
Electrical and Electronic Engineering

Access to Document

10.1109/AMC.2010.5464019

Cite this

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title = "Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator",

abstract = "In industrial precision applications using dual-axis micro-positioning stages powered by piezoelectric actuators (PEA), the trajectory tracking and contour following performances are limited due to PEA's inherent hysteretic nonlinearity and time varying parameters. In order to cope with this problem, a position control scheme based on reinforcement learning cerebellar model articulation controller (RLCMAC) is developed in this paper. In the proposed control scheme, for each individual-axis, a CMAC-based feedforward controller with reinforcement learning scheme and a conventional proportional-integral (PI) feedback controller are used. Moreover, in order to reduce contour errors, a CMAC-based cross-coupled controller (CMAC-CCC) is applied to improve the contouring accuracy of a dual-axis micro-positioning stage. Finally, an integrated control scheme is proposed to improve the tracking and contouring accuracy. Experimental results verify the effectiveness of the proposed approach.",

author = "Wen, \{Chun Ming\} and Ming-Yang Cheng and Su, \{Ke Han\}",

year = "2010",

month = jun,

day = "25",

doi = "10.1109/AMC.2010.5464019",

language = "English",

isbn = "9781424466696",

series = "International Workshop on Advanced Motion Control, AMC",

pages = "82--87",

booktitle = "AMC2010 - The 11th IEEE International Workshop on Advanced Motion Control, Proceedings",

note = "2010 11th IEEE International Workshop on Advanced Motion Control, AMC2010 ; Conference date: 21-03-2010 Through 24-03-2010",

}

Wen, CM, Cheng, M-Y & Su, KH 2010, Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator. in AMC2010 - The 11th IEEE International Workshop on Advanced Motion Control, Proceedings., 5464019, International Workshop on Advanced Motion Control, AMC, pp. 82-87, 2010 11th IEEE International Workshop on Advanced Motion Control, AMC2010, Nagaoka, Niigata, Japan, 10-03-21. https://doi.org/10.1109/AMC.2010.5464019

Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator. / Wen, Chun Ming; Cheng, Ming-Yang; Su, Ke Han.
AMC2010 - The 11th IEEE International Workshop on Advanced Motion Control, Proceedings. 2010. p. 82-87 5464019 (International Workshop on Advanced Motion Control, AMC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator

AU - Wen, Chun Ming

AU - Cheng, Ming-Yang

AU - Su, Ke Han

PY - 2010/6/25

Y1 - 2010/6/25

N2 - In industrial precision applications using dual-axis micro-positioning stages powered by piezoelectric actuators (PEA), the trajectory tracking and contour following performances are limited due to PEA's inherent hysteretic nonlinearity and time varying parameters. In order to cope with this problem, a position control scheme based on reinforcement learning cerebellar model articulation controller (RLCMAC) is developed in this paper. In the proposed control scheme, for each individual-axis, a CMAC-based feedforward controller with reinforcement learning scheme and a conventional proportional-integral (PI) feedback controller are used. Moreover, in order to reduce contour errors, a CMAC-based cross-coupled controller (CMAC-CCC) is applied to improve the contouring accuracy of a dual-axis micro-positioning stage. Finally, an integrated control scheme is proposed to improve the tracking and contouring accuracy. Experimental results verify the effectiveness of the proposed approach.

AB - In industrial precision applications using dual-axis micro-positioning stages powered by piezoelectric actuators (PEA), the trajectory tracking and contour following performances are limited due to PEA's inherent hysteretic nonlinearity and time varying parameters. In order to cope with this problem, a position control scheme based on reinforcement learning cerebellar model articulation controller (RLCMAC) is developed in this paper. In the proposed control scheme, for each individual-axis, a CMAC-based feedforward controller with reinforcement learning scheme and a conventional proportional-integral (PI) feedback controller are used. Moreover, in order to reduce contour errors, a CMAC-based cross-coupled controller (CMAC-CCC) is applied to improve the contouring accuracy of a dual-axis micro-positioning stage. Finally, an integrated control scheme is proposed to improve the tracking and contouring accuracy. Experimental results verify the effectiveness of the proposed approach.

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T3 - International Workshop on Advanced Motion Control, AMC

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BT - AMC2010 - The 11th IEEE International Workshop on Advanced Motion Control, Proceedings

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ER -

Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator

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