TY - GEN
T1 - Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator
AU - Wen, Chun Ming
AU - Cheng, Ming-Yang
AU - Su, Ke Han
PY - 2010/6/25
Y1 - 2010/6/25
N2 - In industrial precision applications using dual-axis micro-positioning stages powered by piezoelectric actuators (PEA), the trajectory tracking and contour following performances are limited due to PEA's inherent hysteretic nonlinearity and time varying parameters. In order to cope with this problem, a position control scheme based on reinforcement learning cerebellar model articulation controller (RLCMAC) is developed in this paper. In the proposed control scheme, for each individual-axis, a CMAC-based feedforward controller with reinforcement learning scheme and a conventional proportional-integral (PI) feedback controller are used. Moreover, in order to reduce contour errors, a CMAC-based cross-coupled controller (CMAC-CCC) is applied to improve the contouring accuracy of a dual-axis micro-positioning stage. Finally, an integrated control scheme is proposed to improve the tracking and contouring accuracy. Experimental results verify the effectiveness of the proposed approach.
AB - In industrial precision applications using dual-axis micro-positioning stages powered by piezoelectric actuators (PEA), the trajectory tracking and contour following performances are limited due to PEA's inherent hysteretic nonlinearity and time varying parameters. In order to cope with this problem, a position control scheme based on reinforcement learning cerebellar model articulation controller (RLCMAC) is developed in this paper. In the proposed control scheme, for each individual-axis, a CMAC-based feedforward controller with reinforcement learning scheme and a conventional proportional-integral (PI) feedback controller are used. Moreover, in order to reduce contour errors, a CMAC-based cross-coupled controller (CMAC-CCC) is applied to improve the contouring accuracy of a dual-axis micro-positioning stage. Finally, an integrated control scheme is proposed to improve the tracking and contouring accuracy. Experimental results verify the effectiveness of the proposed approach.
UR - https://www.scopus.com/pages/publications/77953804696
UR - https://www.scopus.com/pages/publications/77953804696#tab=citedBy
U2 - 10.1109/AMC.2010.5464019
DO - 10.1109/AMC.2010.5464019
M3 - Conference contribution
AN - SCOPUS:77953804696
SN - 9781424466696
T3 - International Workshop on Advanced Motion Control, AMC
SP - 82
EP - 87
BT - AMC2010 - The 11th IEEE International Workshop on Advanced Motion Control, Proceedings
T2 - 2010 11th IEEE International Workshop on Advanced Motion Control, AMC2010
Y2 - 21 March 2010 through 24 March 2010
ER -