TY - JOUR
T1 - Contouring accuracy improvement of a piezo-actuated micro motion stage based on fuzzy cerebellar model articulation controller
AU - Wen, Chun Ming
AU - Cheng, Ming Yang
N1 - Funding Information:
The authors would like to thank the National Science Council of the Republic of China, Taiwan , for support of this research under Grant Nos. NSC 96-2221-E-006-300-MY3 and NSC 99-2221-E-006-200 . In particular, the authors would like to thank Dr. H.-S. Chuang for his assistance with this work.
PY - 2012/11
Y1 - 2012/11
N2 - The motion accuracy and performance of piezoelectric actuators (PEA) are hampered by their inherent hysteresis nonlinearity and time-varying parameters. In order to overcome these drawbacks, an integrated motion control scheme is developed in this paper. In the proposed controller scheme, for each axis of the micro motion stage, a fuzzy CMAC feedforward controller combined with a conventional proportional-integral (PI) feedback controller and a critic-based learning mechanism (FCMAC-CLM) is used to improve the tracking performance and deal with the adverse effects due to hysteresis nonlinearity and external disturbance. In addition, one of the most important issues in the contour following tasks performed by a dual-axis micro motion stage is the contour error reduction. In order to improve the contouring accuracy, a fuzzy CMAC that is capable of real-time learning and self-adjusting is exploited to develop a fuzzy CMAC cross-coupled controller (FCMAC-CCC). Several experiments have been conducted to evaluate the tracking performance and contour accuracy of the proposed approach.
AB - The motion accuracy and performance of piezoelectric actuators (PEA) are hampered by their inherent hysteresis nonlinearity and time-varying parameters. In order to overcome these drawbacks, an integrated motion control scheme is developed in this paper. In the proposed controller scheme, for each axis of the micro motion stage, a fuzzy CMAC feedforward controller combined with a conventional proportional-integral (PI) feedback controller and a critic-based learning mechanism (FCMAC-CLM) is used to improve the tracking performance and deal with the adverse effects due to hysteresis nonlinearity and external disturbance. In addition, one of the most important issues in the contour following tasks performed by a dual-axis micro motion stage is the contour error reduction. In order to improve the contouring accuracy, a fuzzy CMAC that is capable of real-time learning and self-adjusting is exploited to develop a fuzzy CMAC cross-coupled controller (FCMAC-CCC). Several experiments have been conducted to evaluate the tracking performance and contour accuracy of the proposed approach.
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U2 - 10.1016/j.conengprac.2012.06.009
DO - 10.1016/j.conengprac.2012.06.009
M3 - Article
AN - SCOPUS:84866880517
SN - 0967-0661
VL - 20
SP - 1195
EP - 1205
JO - Control Engineering Practice
JF - Control Engineering Practice
IS - 11
ER -