Controllable micrometer positioning design of piezoelectric actuators using a robust fuzzy eliminator

Yung Yue Chen, Li Kai Lin, Min Hao Hung

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


To enhance the consistency and micro positioning accuracy of piezoelectric actuators made based on the batch manufacture, in this paper, a robust fuzzy eliminator with abilities to learn the disturbed actuators' models and to mitigate hysteresis is proposed. This proposed robust fuzzy eliminator can convert the error dynamics between the actuator output position and the desired trajectory into a linear disturbed form, and it quickly converge positioning errors. The residual modelling uncertainties attributed to parameter uncertainties are eliminated with a robust compensator exhibiting positioning error fine-tuning capability. From practical tests, this proposed control law depicts the promising positioning performance in the presence of modelling uncertainties (10%, 20%, and 40% modelling uncertainties), and each controlled piezoelectric actuator has an μm positioning accuracy.

Original languageEnglish
Article number113497
JournalMicroelectronics Reliability
Publication statusPublished - 2019 Dec

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Safety, Risk, Reliability and Quality
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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