Controlled nucleation and growth of graphene: Competitive growth and etching in hydrogen diluted methane

Yon-Hua Tzeng, Kengchih Liang, Chih Yi Liu, Chun Cheng Chang, Yikuan Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Synthesis of graphene of large domain sizes in order to minimize scattering of charge carriers in grain boundaries is an essential process to be achieved before the full merits of graphene can be realized for next-generation nanoelectronics. Independent control of nucleation processes and growth processes in the complicated chemical vapor deposition environments is a key to achieving this goal. Catalyst assisted chemical vapor deposition of graphene on copper at around 1000°C near the melting point of copper in hydrogen diluted methane is fine tuned to reach dynamic balance between etching and growth of graphene. Surface diffusion of carbon atoms generated from methane and other hydrocarbon species, including those from etching graphene by atomic hydrogen, generated by the assistance of copper catalyst on the surface of copper foil results in complicated network of graphene domains separated by alley-like gaps of nearly equal width. By controlling the dynamic balance point, independent control of nucleation and growth and the synthesis of large individual graphene of various unique shapes and graphene films with networked alleys have been demonstrated.

Original languageEnglish
Title of host publication2012 12th IEEE International Conference on Nanotechnology, NANO 2012
DOIs
Publication statusPublished - 2012 Nov 22
Event2012 12th IEEE International Conference on Nanotechnology, NANO 2012 - Birmingham, United Kingdom
Duration: 2012 Aug 202012 Aug 23

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380

Other

Other2012 12th IEEE International Conference on Nanotechnology, NANO 2012
CountryUnited Kingdom
CityBirmingham
Period12-08-2012-08-23

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics

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    Tzeng, Y-H., Liang, K., Liu, C. Y., Chang, C. C., & Wu, Y. (2012). Controlled nucleation and growth of graphene: Competitive growth and etching in hydrogen diluted methane. In 2012 12th IEEE International Conference on Nanotechnology, NANO 2012 [6322095] (Proceedings of the IEEE Conference on Nanotechnology). https://doi.org/10.1109/NANO.2012.6322095