Abstract
The hydrogened diamond like carbon film (DLCH) with 1 urn thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I D/IG ratio fitted from visible Raman spectra and sp 2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The ID/IG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The ID/IG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp 3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.
Original language | English |
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Pages (from-to) | 1847-1852 |
Number of pages | 6 |
Journal | Materials Transactions |
Volume | 47 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2006 Jul |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering