Correlation between ID/IG ratio from visible Raman spectra and sp2/sp3 ratio from XPS spectra of annealed hydrogenated DLC film

F. C. Tai; S. C. Lee; C. H. Wei; S. L. Tyan

doi:10.2320/matertrans.47.1847

Correlation between I_D/I_G ratio from visible Raman spectra and sp²/sp³ ratio from XPS spectra of annealed hydrogenated DLC film

F. C. Tai, S. C. Lee, C. H. Wei, S. L. Tyan

Department of Physics

Research output: Contribution to journal › Article › peer-review

119 Citations (Scopus)

Abstract

The hydrogened diamond like carbon film (DLCH) with 1 urn thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I _D/I_G ratio fitted from visible Raman spectra and sp ²/sp³ ratio done from XPS spectra of DLCH film shows a trend. The I_D/I_G ratio of deconvoluted visible Raman spectra shows a correlation with sp²/sp³ ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The I_D/I_G ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp²/sp ³ ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.

Original language	English
Pages (from-to)	1847-1852
Number of pages	6
Journal	Materials Transactions
Volume	47
Issue number	7
DOIs	https://doi.org/10.2320/matertrans.47.1847
Publication status	Published - 2006 Jul

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Correlation between ID/IG ratio from visible Raman spectra and sp2/sp3 ratio from XPS spectra of annealed hydrogenated DLC film",

abstract = "The hydrogened diamond like carbon film (DLCH) with 1 urn thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I D/IG ratio fitted from visible Raman spectra and sp 2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The ID/IG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The ID/IG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp 3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.",

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year = "2006",

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T1 - Correlation between ID/IG ratio from visible Raman spectra and sp2/sp3 ratio from XPS spectra of annealed hydrogenated DLC film

AU - Tai, F. C.

AU - Lee, S. C.

AU - Wei, C. H.

AU - Tyan, S. L.

PY - 2006/7

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N2 - The hydrogened diamond like carbon film (DLCH) with 1 urn thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I D/IG ratio fitted from visible Raman spectra and sp 2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The ID/IG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The ID/IG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp 3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.

AB - The hydrogened diamond like carbon film (DLCH) with 1 urn thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I D/IG ratio fitted from visible Raman spectra and sp 2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The ID/IG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The ID/IG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp 3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.

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Correlation between I_D/I_G ratio from visible Raman spectra and sp²/sp³ ratio from XPS spectra of annealed hydrogenated DLC film

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