Correlation between ID/IG ratio from visible Raman spectra and sp2/sp3 ratio from XPS spectra of annealed hydrogenated DLC film

F. C. Tai, S. C. Lee, C. H. Wei, Shing-Long Tyan

Research output: Contribution to journalArticle

83 Citations (Scopus)

Abstract

The hydrogened diamond like carbon film (DLCH) with 1 urn thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I D/IG ratio fitted from visible Raman spectra and sp 2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The ID/IG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The ID/IG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp 3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.

Original languageEnglish
Pages (from-to)1847-1852
Number of pages6
JournalMaterials Transactions
Volume47
Issue number7
DOIs
Publication statusPublished - 2006 Jul 1

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visible spectrum
Raman scattering
X ray photoelectron spectroscopy
Raman spectra
Diamond like carbon films
Graphitization
graphitization
curves
Hydrocarbons
Ion beams
hydrocarbons
Gases
diamonds
ion beams
disorders
Annealing
trends
Oxidation
oxidation
annealing

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Metals and Alloys

Cite this

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abstract = "The hydrogened diamond like carbon film (DLCH) with 1 urn thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I D/IG ratio fitted from visible Raman spectra and sp 2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The ID/IG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The ID/IG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp 3 ratio fitted with three-curve with 100{\%} Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.",
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Correlation between ID/IG ratio from visible Raman spectra and sp2/sp3 ratio from XPS spectra of annealed hydrogenated DLC film. / Tai, F. C.; Lee, S. C.; Wei, C. H.; Tyan, Shing-Long.

In: Materials Transactions, Vol. 47, No. 7, 01.07.2006, p. 1847-1852.

Research output: Contribution to journalArticle

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T1 - Correlation between ID/IG ratio from visible Raman spectra and sp2/sp3 ratio from XPS spectra of annealed hydrogenated DLC film

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