Abstract
The hydrogened diamond like carbon film (DLCH) with 1 urn thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I D/IG ratio fitted from visible Raman spectra and sp 2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The ID/IG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The ID/IG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp 3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.
| Original language | English |
|---|---|
| Pages (from-to) | 1847-1852 |
| Number of pages | 6 |
| Journal | Materials Transactions |
| Volume | 47 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 2006 Jul 1 |
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All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Metals and Alloys
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Correlation between ID/IG ratio from visible Raman spectra and sp2/sp3 ratio from XPS spectra of annealed hydrogenated DLC film. / Tai, F. C.; Lee, S. C.; Wei, C. H.; Tyan, Shing-Long.
In: Materials Transactions, Vol. 47, No. 7, 01.07.2006, p. 1847-1852.Research output: Contribution to journal › Article
TY - JOUR
T1 - Correlation between ID/IG ratio from visible Raman spectra and sp2/sp3 ratio from XPS spectra of annealed hydrogenated DLC film
AU - Tai, F. C.
AU - Lee, S. C.
AU - Wei, C. H.
AU - Tyan, Shing-Long
PY - 2006/7/1
Y1 - 2006/7/1
N2 - The hydrogened diamond like carbon film (DLCH) with 1 urn thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I D/IG ratio fitted from visible Raman spectra and sp 2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The ID/IG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The ID/IG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp 3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.
AB - The hydrogened diamond like carbon film (DLCH) with 1 urn thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I D/IG ratio fitted from visible Raman spectra and sp 2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The ID/IG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The ID/IG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp 3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.
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UR - http://www.scopus.com/inward/citedby.url?scp=33748534163&partnerID=8YFLogxK
U2 - 10.2320/matertrans.47.1847
DO - 10.2320/matertrans.47.1847
M3 - Article
AN - SCOPUS:33748534163
VL - 47
SP - 1847
EP - 1852
JO - Materials Transactions
JF - Materials Transactions
SN - 0916-1821
IS - 7
ER -