TY - GEN
T1 - Coupled multiphysics circuital modelling of micro-opto-mechanical pressure sensor systems
AU - Troia, Benedetto
AU - Huang, Chih Hsien
AU - Mao, Shengping
AU - Gao, Hang
AU - Figeys, Bruno
AU - Jansen, Roelof
AU - Rochus, Veronique
AU - Rottenberg, Xavier
N1 - Publisher Copyright:
© 2018 SPIE.
PY - 2018
Y1 - 2018
N2 - Micro-opto-mechanical pressure sensors (MOMPS) based on integrated optical Mach-Zehnder interferometers (MZI) have been fabricated at IMEC, exhibiting much improved sensitivity and noise performance compared to their piezoelectric and capacitive counterparts. However, the design of next generation MOMPS systems on chip still remains uncertain due to the intrinsic multiphysics nature covering mechanical, optical and electrical phenomena. For this reason, we present a sophisticated, flexible and customizable algorithmic tool for the multiphysics simulation and design of highperformance MOMPS systems on chip, including mechanical and optical effects as well as the electronic circuitry for the readout. Furthermore, static and dynamic operating regimes are analyzed, also comparing analytical solutions with experimental results and demonstrating a good agreement. Finally, system noise contributions generated by the optoelectronic components and readout electronics are calculated and a static sensitivity of 8 mV/Pa is measured in the fabricated sensors.
AB - Micro-opto-mechanical pressure sensors (MOMPS) based on integrated optical Mach-Zehnder interferometers (MZI) have been fabricated at IMEC, exhibiting much improved sensitivity and noise performance compared to their piezoelectric and capacitive counterparts. However, the design of next generation MOMPS systems on chip still remains uncertain due to the intrinsic multiphysics nature covering mechanical, optical and electrical phenomena. For this reason, we present a sophisticated, flexible and customizable algorithmic tool for the multiphysics simulation and design of highperformance MOMPS systems on chip, including mechanical and optical effects as well as the electronic circuitry for the readout. Furthermore, static and dynamic operating regimes are analyzed, also comparing analytical solutions with experimental results and demonstrating a good agreement. Finally, system noise contributions generated by the optoelectronic components and readout electronics are calculated and a static sensitivity of 8 mV/Pa is measured in the fabricated sensors.
UR - http://www.scopus.com/inward/record.url?scp=85049533742&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85049533742&partnerID=8YFLogxK
U2 - 10.1117/12.2290361
DO - 10.1117/12.2290361
M3 - Conference contribution
AN - SCOPUS:85049533742
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - MOEMS and Miniaturized Systems XVII
A2 - Park, Yong-Hwa
A2 - Zappe, Hans
A2 - Piyawattanametha, Wibool
PB - SPIE
T2 - MOEMS and Miniaturized Systems XVII 2018
Y2 - 30 January 2018 through 31 January 2018
ER -