Coupled multiphysics circuital modelling of micro-opto-mechanical pressure sensor systems

Benedetto Troia, Chih Hsien Huang, Shengping Mao, Hang Gao, Bruno Figeys, Roelof Jansen, Veronique Rochus, Xavier Rottenberg

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Micro-opto-mechanical pressure sensors (MOMPS) based on integrated optical Mach-Zehnder interferometers (MZI) have been fabricated at IMEC, exhibiting much improved sensitivity and noise performance compared to their piezoelectric and capacitive counterparts. However, the design of next generation MOMPS systems on chip still remains uncertain due to the intrinsic multiphysics nature covering mechanical, optical and electrical phenomena. For this reason, we present a sophisticated, flexible and customizable algorithmic tool for the multiphysics simulation and design of highperformance MOMPS systems on chip, including mechanical and optical effects as well as the electronic circuitry for the readout. Furthermore, static and dynamic operating regimes are analyzed, also comparing analytical solutions with experimental results and demonstrating a good agreement. Finally, system noise contributions generated by the optoelectronic components and readout electronics are calculated and a static sensitivity of 8 mV/Pa is measured in the fabricated sensors.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XVII
EditorsYong-Hwa Park, Hans Zappe, Wibool Piyawattanametha
PublisherSPIE
ISBN (Electronic)9781510615755
DOIs
Publication statusPublished - 2018 Jan 1
EventMOEMS and Miniaturized Systems XVII 2018 - San Francisco, United States
Duration: 2018 Jan 302018 Jan 31

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10545
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherMOEMS and Miniaturized Systems XVII 2018
CountryUnited States
CitySan Francisco
Period18-01-3018-01-31

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Troia, B., Huang, C. H., Mao, S., Gao, H., Figeys, B., Jansen, R., Rochus, V., & Rottenberg, X. (2018). Coupled multiphysics circuital modelling of micro-opto-mechanical pressure sensor systems. In Y-H. Park, H. Zappe, & W. Piyawattanametha (Eds.), MOEMS and Miniaturized Systems XVII [1054518] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10545). SPIE. https://doi.org/10.1117/12.2290361