“Critical Dimension Atomic Force Microscopy for sub-50 nm microelectronics technology nodes”, Applied Scanning Probe Methods, Vol. 8

Research output: Book/Report › Book

Cite this

TY - BOOK

T1 - “Critical Dimension Atomic Force Microscopy for sub-50 nm microelectronics technology nodes”, Applied Scanning Probe Methods, Vol. 8

AU - Liu, Hao-Chih

PY - 2007/12

Y1 - 2007/12

M3 - Book

BT - “Critical Dimension Atomic Force Microscopy for sub-50 nm microelectronics technology nodes”, Applied Scanning Probe Methods, Vol. 8

PB - Unknown Publisher

ER -