Cross-plane thermoelectric properties in Si/Ge superlattices

Bao Yang, Jian L. Liu, Kang L. Wang, Gang Chen

Research output: Contribution to journalConference articlepeer-review


In this paper, a set of methods is developed to measure the Seebeck coefficient, electrical conductivity, and thermal conductivity in the cross-plane direction of thin films. The method employs microfabricated heaters, voltage and temperature sensors, and phase-lock amplifiers to determine the temperature and Seebeck voltage oscillation in the cross-plane direction of the samples, from which the thermal conductivity and Seebeck coefficient of thin films are determined simultaneously. The cross-plane electrical conductivity is also measured by a modified transmission line model. These methods are applied to Si/Ge superlattices grown by molecular beam epitaxy.

Original languageEnglish
Pages (from-to)71-76
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - 2002
EventThermoelectric Materials 2001-Research and Applications - Boston, MA, United States
Duration: 2001 Nov 262001 Nov 29

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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