Crystal growth of SrTiO3 films on H-terminated Si(1 1 1) with SrO buffer layers

  • Y. MacHida
  • , H. Asaoka
  • , H. Yamamoto
  • , S. Shamoto

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

Growth of epitaxial SrTiO3 (STO) films has been examined on H-terminated Si(1 1 1) with SrO buffer layers. The epitaxial SrO buffer layers have reduced stress on H-terminated Si substrates. On the SrO buffer layers, the STO films grow epitaxially with triple domains at low temperature. Each STO domain has equivalent epitaxial relationship to SrO buffer layers, STO(1 1 0)∥SrO(1 1 1) and STO[001]∥SrO[11̄0].

Original languageEnglish
Pages (from-to)724-728
Number of pages5
JournalSurface Science
Volume600
Issue number3
DOIs
Publication statusPublished - 2006 Feb 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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