@inproceedings{aad40def7d61424fb6b39b70d252eeba,
title = "CVD flow field modeling using the Quiet Direct Simulation (QDS) method",
abstract = "In this paper, the Quiet Direct Simulation (QDS) method is used to model the unsteady jet development in a Pulsed Pressure Chemical Vapour Deposition (PP-CVD) reactor. QDS is a novel method of gas flow simulation which is able to compute true-direction fluxes of mass, momentum and energy in a computationally efficient and accurate manner. The scheme is ideal for the simulation of novel CVD processes like PP-CVD which include highly unsteady flow structures and which has previously proved extremely difficult to simulate. Here, the axisymmetric QDS solver is outlined and the injection phase of a PP-CVD reactor is simulated.",
author = "Cave, {H. M.} and Lim, {C. W.} and Jermy, {M. C.} and Wu, {J. S.} and Smith, {M. R.} and Krumdieck, {S. P.}",
note = "Copyright: Copyright 2010 Elsevier B.V., All rights reserved.; 17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society ; Conference date: 04-10-2009 Through 09-10-2009",
year = "2009",
doi = "10.1149/1.3207617",
language = "English",
isbn = "9781566777452",
series = "ECS Transactions",
number = "8 PART 1",
pages = "389--396",
booktitle = "ECS Transactions - EuroCVD 17/CVD 17",
edition = "8 PART 1",
}