Damage and annealing recovery of boron-implanted ultra-shallow junction: The correlation between beam current and surface configuration
- Feng Ming Chang
- , Zong Zhe Wu
- , Yen Fu Lin
- , Li Chi Kao
- , Cheng Ta Wu
- , Shiu Ko JangJian
- , Yuan Nian Chen
- , Kuang Yao Lo
Research output: Contribution to journal › Article › peer-review
3
Link opens in a new tab
Citations
(Scopus)