Damascene process simulation using molecular dynamics

Shin Pon Ju, Cheng I. Weng, Chi Chuan Hwang

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Molecular dynamics was used to investigate trench filling in the damascene process. The qualitative behavior of the trench filling process was described in terms of the filling morphology and the filling characteristic. The significance of the geometric size of the simulation model was also evaluated. It was found that the geometric dimensions of the model become significant when the incident energy is small.

Original languageEnglish
Pages (from-to)7062-7069
Number of pages8
JournalJournal of Applied Physics
Volume92
Issue number12
DOIs
Publication statusPublished - 2002 Dec 15

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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