Damascene process simulation using molecular dynamics

Shin Pon Ju; Cheng I. Weng; Chi Chuan Hwang

doi:10.1063/1.1519947

Damascene process simulation using molecular dynamics

Shin Pon Ju, Cheng I. Weng, Chi Chuan Hwang

Department of Engineering Science

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Molecular dynamics was used to investigate trench filling in the damascene process. The qualitative behavior of the trench filling process was described in terms of the filling morphology and the filling characteristic. The significance of the geometric size of the simulation model was also evaluated. It was found that the geometric dimensions of the model become significant when the incident energy is small.

Original language	English
Pages (from-to)	7062-7069
Number of pages	8
Journal	Journal of Applied Physics
Volume	92
Issue number	12
DOIs	https://doi.org/10.1063/1.1519947
Publication status	Published - 2002 Dec 15

All Science Journal Classification (ASJC) codes

General Physics and Astronomy

Access to Document

10.1063/1.1519947

Cite this

@article{b4c8043de40d4cb1af290377fb9cc235,

title = "Damascene process simulation using molecular dynamics",

abstract = "Molecular dynamics was used to investigate trench filling in the damascene process. The qualitative behavior of the trench filling process was described in terms of the filling morphology and the filling characteristic. The significance of the geometric size of the simulation model was also evaluated. It was found that the geometric dimensions of the model become significant when the incident energy is small.",

author = "Ju, {Shin Pon} and Weng, {Cheng I.} and Hwang, {Chi Chuan}",

year = "2002",

month = dec,

day = "15",

doi = "10.1063/1.1519947",

language = "English",

volume = "92",

pages = "7062--7069",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "12",

}

TY - JOUR

T1 - Damascene process simulation using molecular dynamics

AU - Ju, Shin Pon

AU - Weng, Cheng I.

AU - Hwang, Chi Chuan

PY - 2002/12/15

Y1 - 2002/12/15

N2 - Molecular dynamics was used to investigate trench filling in the damascene process. The qualitative behavior of the trench filling process was described in terms of the filling morphology and the filling characteristic. The significance of the geometric size of the simulation model was also evaluated. It was found that the geometric dimensions of the model become significant when the incident energy is small.

AB - Molecular dynamics was used to investigate trench filling in the damascene process. The qualitative behavior of the trench filling process was described in terms of the filling morphology and the filling characteristic. The significance of the geometric size of the simulation model was also evaluated. It was found that the geometric dimensions of the model become significant when the incident energy is small.

UR - http://www.scopus.com/inward/record.url?scp=0037115662&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037115662&partnerID=8YFLogxK

U2 - 10.1063/1.1519947

DO - 10.1063/1.1519947

M3 - Article

AN - SCOPUS:0037115662

SN - 0021-8979

VL - 92

SP - 7062

EP - 7069

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 12

ER -

Damascene process simulation using molecular dynamics

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this