Data science framework for variable selection, metrology prediction, and process control in TFT-LCD manufacturing

Chia Yen Lee, Tsung Lun Tsai

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

TFT-LCD panel manufacturers rely on experimental design and engineering experience for process monitoring and quality control throughout the production line. To shorten production and reduce the cost of labor resources, this study proposes a three-phase data science framework embedded with several data mining and machine learning techniques, which can identify the variables affecting yield, predict the metrology result of photo spacer process, and suggest the process control in the color filter manufacturing process. An empirical study of Taiwan's leading TFT-LCD manufacturer is conducted to validate the proposed framework. The results indicate that the proposed framework effectively and quickly selects the important variables, predicts the metrology result with higher performance, and identifies the main effect and interaction effect of the selected variables for yield improvement.

Original languageEnglish
Pages (from-to)76-87
Number of pages12
JournalRobotics and Computer-Integrated Manufacturing
Volume55
DOIs
Publication statusPublished - 2019 Feb

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Software
  • Mathematics(all)
  • Computer Science Applications
  • Industrial and Manufacturing Engineering

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