Decomposition of dichlorodifluoromethane by adding hydrogen in a cold plasma system

Ya Fen Wang, Wen Jhy Lee, Chuh Yung Chen, Lien Te Hsieh

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31 Citations (Scopus)


The destruction of chlorofluorocarbons (CFCs) has drawn great attention because of its well-known depletion of the ozone layer at the stratosphere. Application of RF plasma for the decomposition and conversion of dichlorodifluoromethane (CFC-12 or CCl2F2) is demonstrated. The decomposition efficiency (η(CFC-12)) and the fraction of total carbon input converted into CH4 and C2H2 (F(CH4+C2H2)) in H2 and Ar mixtures have been investigated as a function of input power wattage, H2/CFC-12 ratio, operational pressure, and CFC-12 feeding concentration by using response surface methodology and model sensitivity analysis. The results showed that the η(CFC-12) is over 94% and the F(CH4+C2H2) is over 80% under the condition of 100 W of input power wattage, 7.0 of H2/CFC-12 ratio, 15 Torr of operational pressure, and 7.6% of CFC-12 feeding concentration. In addition, the result of sensitivity analysis indicated that both the η(CFC- 12) and the F(CH4+C2H2) are more sensitive to CFC-12 feeding concentration and input power wattage. Experimental results showed that CFC-12 could be converted into CH4 and C2H2 up to 80% of conversion in a hydrogen-based RF plasma system.

Original languageEnglish
Pages (from-to)2234-2240
Number of pages7
JournalEnvironmental Science and Technology
Issue number13
Publication statusPublished - 1999 Jul 1

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Environmental Chemistry


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