Deep reactive ion etching of silicon

A. A. Ayön, K. S. Chen, K. A. Lohner, S. M. Spearing, H. Sawin, M. A. Schmidt

Research output: Contribution to journalConference articlepeer-review

17 Citations (Scopus)


Dive into the research topics of 'Deep reactive ion etching of silicon'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds