Dependence of crystal structure and work function of WNX films on the nitrogen content

Pei Chuen Jiang; Yi Sheng Lai; J. S. Chen

doi:10.1063/1.2349313

Dependence of crystal structure and work function of WN_X films on the nitrogen content

Pei Chuen Jiang, Yi Sheng Lai, J. S. Chen

Research output: Contribution to journal › Article › peer-review

40 Citations (Scopus)

Abstract

The effect of nitrogen content on crystal structure (phase and grain size) and work function (Φ_m) of WN_x films is investigated. The Φ_m of WN_x films is extracted from the plot of flatband voltage versus SiO₂ thickness. For W and WN_0.4 films, the Φ_m are 4.67 and 4.39 V, and their crystal phases are both body-centered-cubic W. For WN_0.6 film, it contains W+W ₂N mixed phases and the Φ_m is 4.50 V. On the other hand, the Φ_m of WN_0.8 and WN_1.5 films are 5.01 and 4.49 V, and their crystal phases are both face-centered-cubic W ₂N. The grain size of W and W₂N phases decreases with the increase of the nitrogen content in WN_x. It is concluded that the m is affected by the crystal phase as well as the grain size of WN_x film.

Original language	English
Article number	122107
Journal	Applied Physics Letters
Volume	89
Issue number	12
DOIs	https://doi.org/10.1063/1.2349313
Publication status	Published - 2006

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.2349313

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@article{b003e5e4f9b74a4d981849e8c8c42507,

title = "Dependence of crystal structure and work function of WNX films on the nitrogen content",

abstract = "The effect of nitrogen content on crystal structure (phase and grain size) and work function (Φm) of WNx films is investigated. The Φm of WNx films is extracted from the plot of flatband voltage versus SiO2 thickness. For W and WN0.4 films, the Φm are 4.67 and 4.39 V, and their crystal phases are both body-centered-cubic W. For WN0.6 film, it contains W+W 2N mixed phases and the Φm is 4.50 V. On the other hand, the Φm of WN0.8 and WN1.5 films are 5.01 and 4.49 V, and their crystal phases are both face-centered-cubic W 2N. The grain size of W and W2N phases decreases with the increase of the nitrogen content in WNx. It is concluded that the m is affected by the crystal phase as well as the grain size of WNx film.",

author = "Jiang, {Pei Chuen} and Lai, {Yi Sheng} and Chen, {J. S.}",

note = "Funding Information: The authors gratefully appreciate the financial support from the National Science Council of Taiwan, R.O.C. (Grant Nos. NSC 93-2216-E-006-015 and NSC 94-2216-E-006-033). They also are greatly indebted to the Nuclear Science Technology Development Center at National Tsing Hua University, Taiwan, for RBS facilities. ",

year = "2006",

doi = "10.1063/1.2349313",

language = "English",

volume = "89",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

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AU - Jiang, Pei Chuen

AU - Lai, Yi Sheng

AU - Chen, J. S.

N1 - Funding Information: The authors gratefully appreciate the financial support from the National Science Council of Taiwan, R.O.C. (Grant Nos. NSC 93-2216-E-006-015 and NSC 94-2216-E-006-033). They also are greatly indebted to the Nuclear Science Technology Development Center at National Tsing Hua University, Taiwan, for RBS facilities.

PY - 2006

Y1 - 2006

N2 - The effect of nitrogen content on crystal structure (phase and grain size) and work function (Φm) of WNx films is investigated. The Φm of WNx films is extracted from the plot of flatband voltage versus SiO2 thickness. For W and WN0.4 films, the Φm are 4.67 and 4.39 V, and their crystal phases are both body-centered-cubic W. For WN0.6 film, it contains W+W 2N mixed phases and the Φm is 4.50 V. On the other hand, the Φm of WN0.8 and WN1.5 films are 5.01 and 4.49 V, and their crystal phases are both face-centered-cubic W 2N. The grain size of W and W2N phases decreases with the increase of the nitrogen content in WNx. It is concluded that the m is affected by the crystal phase as well as the grain size of WNx film.

AB - The effect of nitrogen content on crystal structure (phase and grain size) and work function (Φm) of WNx films is investigated. The Φm of WNx films is extracted from the plot of flatband voltage versus SiO2 thickness. For W and WN0.4 films, the Φm are 4.67 and 4.39 V, and their crystal phases are both body-centered-cubic W. For WN0.6 film, it contains W+W 2N mixed phases and the Φm is 4.50 V. On the other hand, the Φm of WN0.8 and WN1.5 films are 5.01 and 4.49 V, and their crystal phases are both face-centered-cubic W 2N. The grain size of W and W2N phases decreases with the increase of the nitrogen content in WNx. It is concluded that the m is affected by the crystal phase as well as the grain size of WNx film.

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