DEPENDENCE OF PROPERTIES ON PLASMA POWER IN AN a-Si-H FILM.

C. Y. Chang, Y. K. Fang, W. L. Lin, W. C. Hsu

Research output: Contribution to conference › Paper › peer-review

All Science Journal Classification (ASJC) codes

TY - CONF

T1 - DEPENDENCE OF PROPERTIES ON PLASMA POWER IN AN a-Si-H FILM.

AU - Chang, C. Y.

AU - Fang, Y. K.

AU - Lin, W. L.

AU - Hsu, W. C.

PY - 1981

Y1 - 1981

UR - http://www.scopus.com/inward/record.url?scp=0019718181&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0019718181&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0019718181

SP - 368

EP - 374

ER -