DEPENDENCE OF PROPERTIES ON PLASMA POWER IN AN a-Si-H FILM.

C. Y. Chang, Y. K. Fang, W. L. Lin, W. C. Hsu

Research output: Contribution to conferencePaper

2 Citations (Scopus)
Original languageEnglish
Pages368-374
Number of pages7
Publication statusPublished - 1981

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Chang, C. Y., Fang, Y. K., Lin, W. L., & Hsu, W. C. (1981). DEPENDENCE OF PROPERTIES ON PLASMA POWER IN AN a-Si-H FILM.. 368-374.