High-quality (0001) oriented ZnO (300 Å) film and [ZnO(100 Å)/Al(tAl)]3 (tAl = 0.6, 1.7, 2.8 Å) multilayers have been established at room temperature on Al 2O3 (0001) substrates by ion-beam sputtering. The structural, optical and electrical properties of multilayers as functions of both the Al thickness and annealing temperature are reported. We have verified that Al thickness and annealing temperature are the key factors to optimize transparency-conducting property in ZnO/Al multilayers. The optimum Al thickness and annealing temperature for ZnO/Al multilayer of 300 Å thin is 1.7 Å (about one Al atomic layer) and 400 °C, respectively, leading to the relatively lower resistivity (2.8 × 10- 3 Ω cm) and higher Hall mobility (10 cm2/V•s) without suppression of the visible transmittance (above 85%).
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry