Deposition and characterization of a novel integrated ZnO nanorods/thin film structure

Ta Lei Chou, Jyh Ming Ting

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


One-dimensional (1-D) ZnO (zinc oxide) nanostructures have received a lot of attention due to their superior properties. Various techniques have been developed to synthesize ZnO nanorods at high-temperature process using vapor-liquid-solid (VLS) mechanism. In this paper, we report a novel process to synthesize integrated ZnO nanorods/thin film structures using an RF magnetron sputter deposition under different deposition parameters and substrate conditions. The substrate used was glass plated with electroless Cu prepared using various conditions. The resulting specimens are analyzed using scanning electron microscopy (SEM), transmission electron microscopy (TEM), and X-ray diffraction (XRD). The effect of the copper surface roughness was found to be significant. ZnO nanorods were found only when the copper layer is rough enough. The roughness of the copper in general increases with the plating time and/or the ratio of VHCHO/VCu used in the plating bath. Post-plating annealing of the copper was also found to increase the surface roughness of the copper.

Original languageEnglish
Pages (from-to)291-295
Number of pages5
JournalThin Solid Films
Issue number1-2
Publication statusPublished - 2006 Jan 3

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Deposition and characterization of a novel integrated ZnO nanorods/thin film structure'. Together they form a unique fingerprint.

Cite this