Deposition of Ag-based Al-doped ZnO multilayer coatings for the transparent conductive electrodes by electron beam evaporation

D. R. Sahu; Shin Yuan Lin; Jow Lay Huang

doi:10.1016/j.solmat.2007.02.003

Deposition of Ag-based Al-doped ZnO multilayer coatings for the transparent conductive electrodes by electron beam evaporation

D. R. Sahu, Shin Yuan Lin, Jow Lay Huang

Research output: Contribution to journal › Article › peer-review

68 Citations (Scopus)

Abstract

Silver-based Al-doped ZnO (AZO) multilayer coatings were prepared on glass by e-beam evaporation techniques. Optimization of the deposition conditions of both AZO and Ag layers were performed for better electrical and optical properties. The properties of the multilayers were affected by the deposition process of both AZO and Ag layers. The best multilayer coatings exhibit low sheet resistance of 5.34 Ω/sq and transmittance of more than 85%. The coatings have satisfactory properties of low resistance and high transmittance for application as transparent conductive electrodes.

Original language	English
Pages (from-to)	851-855
Number of pages	5
Journal	Solar Energy Materials and Solar Cells
Volume	91
Issue number	9
DOIs	https://doi.org/10.1016/j.solmat.2007.02.003
Publication status	Published - 2007 May 23

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Renewable Energy, Sustainability and the Environment
Surfaces, Coatings and Films

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title = "Deposition of Ag-based Al-doped ZnO multilayer coatings for the transparent conductive electrodes by electron beam evaporation",

abstract = "Silver-based Al-doped ZnO (AZO) multilayer coatings were prepared on glass by e-beam evaporation techniques. Optimization of the deposition conditions of both AZO and Ag layers were performed for better electrical and optical properties. The properties of the multilayers were affected by the deposition process of both AZO and Ag layers. The best multilayer coatings exhibit low sheet resistance of 5.34 Ω/sq and transmittance of more than 85%. The coatings have satisfactory properties of low resistance and high transmittance for application as transparent conductive electrodes.",

author = "Sahu, {D. R.} and Lin, {Shin Yuan} and Huang, {Jow Lay}",

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AU - Sahu, D. R.

AU - Lin, Shin Yuan

AU - Huang, Jow Lay

PY - 2007/5/23

Y1 - 2007/5/23

N2 - Silver-based Al-doped ZnO (AZO) multilayer coatings were prepared on glass by e-beam evaporation techniques. Optimization of the deposition conditions of both AZO and Ag layers were performed for better electrical and optical properties. The properties of the multilayers were affected by the deposition process of both AZO and Ag layers. The best multilayer coatings exhibit low sheet resistance of 5.34 Ω/sq and transmittance of more than 85%. The coatings have satisfactory properties of low resistance and high transmittance for application as transparent conductive electrodes.

AB - Silver-based Al-doped ZnO (AZO) multilayer coatings were prepared on glass by e-beam evaporation techniques. Optimization of the deposition conditions of both AZO and Ag layers were performed for better electrical and optical properties. The properties of the multilayers were affected by the deposition process of both AZO and Ag layers. The best multilayer coatings exhibit low sheet resistance of 5.34 Ω/sq and transmittance of more than 85%. The coatings have satisfactory properties of low resistance and high transmittance for application as transparent conductive electrodes.

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