Deposition of silicon carbon nitride films by ion beam sputtering

J. J. Wu, C. T. Wu, Y. C. Liao, T. R. Lu, L. C. Chen, K. H. Chen, L. G. Hwa, C. T. Kuo, K. J. Ling

Research output: Contribution to journalConference articlepeer-review

41 Citations (Scopus)

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