Deposition of SiO2 layers on 4H-SiC by photochemical vapor deposition

Yu Zung Chiou, Chia Sheng Chang, Shoou Jinn Chang, Yan Kuin Su, Jung Ran Chiou, Bohr Ran Huang, Jone F. Chen

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Deposition of SiO<sub>2</sub> layers on 4H-SiC by photochemical vapor deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy