Design, analysis, and control of a cascaded piezoelectric actuated two-degrees-of-freedom precision stage

Jer Wei Li, Kuo Shen Chen, Yun Hui Liu

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, a novel piezoelectric driven compliant stage and its associated PC-based X-Y axes control system was development as the carrier of automatic optical inspection (AOI) systems for both enhancing system bandwidth and reducing motion-induced vibration. By integrating feedback control with the stage, it is possible to suppress the vibration and therefore improve the inspection yields of AOI. The cascaded structure design can effectively reduce the system complexity and can be further extended for additional degrees of freedom. Based on the test results, the designed stage can achieve a closed loop bandwidth up to 100 Hz and a steady state resolution less than 50 nm using a model reference sliding mode controller. In summary, this study has successfully set up a structurally-simple and low-cost positioning system and is able to achieve high-precise motion. It is hope that the result of this study can be further expanded to longer stroke and higher precise positioning system, and integrates with cutting edge technologies for developing more superior precise instrument in the future.

Original languageEnglish
Pages (from-to)856-861
Number of pages6
JournalInternational Journal of Earth Sciences and Engineering
Volume6
Issue number4
Publication statusPublished - 2013 Jan 1

All Science Journal Classification (ASJC) codes

  • Environmental Engineering
  • Civil and Structural Engineering
  • Building and Construction
  • Ocean Engineering
  • Earth and Planetary Sciences(all)

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