TY - JOUR
T1 - Design and characterisation of a compact 4-degree-of-freedom fast steering mirror system based on double Porro prisms for laser beam stabilization
AU - Chang, Yu Hao
AU - Hao, Guangbo
AU - Liu, Chien Sheng
N1 - Funding Information:
The authors gratefully acknowledge the financial support provided to this study by the Ministry of Science and Technology of Taiwan under Grant Nos. MOST 105-2221-E-194-013-MY5 , 106-2628-E-194-001-MY3 , and 108-2218-E-002-071 .
Publisher Copyright:
© 2021 Elsevier B.V.
Copyright:
Copyright 2021 Elsevier B.V., All rights reserved.
PY - 2021/5/1
Y1 - 2021/5/1
N2 - This paper proposes a 4-degree-of-freedom (DOF) actuator for a fast steer mirror (FSM) compensation system in order to compensate for 4-DOF laser errors. The mathematic system modeling was built to design and predict the performance of the proposed 4-DOF FSM. Finite element analysis was performed by using a commercial software to analyze the characteristics of the electromagnetic structure and mechanical structure for the proposed 4-DOF FSM. This study further verifies the properties of the proposed 4-DOF FSM by using a laboratory-built prototype. The proposed 4-DOF FSM has the travel range of ±5 mrad and ±0.04 mm along X and Y axes with accuracy of 0.025 mrad and 0.0012 mm and the bandwidth of rotational part and translational part are 10 Hz and 39 Hz, respectively.
AB - This paper proposes a 4-degree-of-freedom (DOF) actuator for a fast steer mirror (FSM) compensation system in order to compensate for 4-DOF laser errors. The mathematic system modeling was built to design and predict the performance of the proposed 4-DOF FSM. Finite element analysis was performed by using a commercial software to analyze the characteristics of the electromagnetic structure and mechanical structure for the proposed 4-DOF FSM. This study further verifies the properties of the proposed 4-DOF FSM by using a laboratory-built prototype. The proposed 4-DOF FSM has the travel range of ±5 mrad and ±0.04 mm along X and Y axes with accuracy of 0.025 mrad and 0.0012 mm and the bandwidth of rotational part and translational part are 10 Hz and 39 Hz, respectively.
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U2 - 10.1016/j.sna.2021.112639
DO - 10.1016/j.sna.2021.112639
M3 - Article
AN - SCOPUS:85101646505
VL - 322
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
SN - 0924-4247
M1 - 112639
ER -