Design and characterization of precise laser-based autofocusing microscope with reduced geometrical fluctuations

Chien-Sheng Liu, Yang Cheng Lin, Pin Hao Hu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The present study proposes a laser-based microscope system in which a precise autofocusing capability is achieved using a position feedback signal based on the distance L between the geometrical center (Xc, Yc) of the image captured by the CCD sensor and the centroid (xcentroid, ycentroid) of the image. The experimental results show that the proposed system has a positioning accuracy of 2.2 μm given a working range of ±200 μm. The autofocusing performance of the proposed system is thus better than that of a conventional centroid-based system, which typically achieves a positioning accuracy of around 5.2 μm.

Original languageEnglish
Title of host publicationInnovation for Applied Science and Technology
Pages672-676
Number of pages5
DOIs
Publication statusPublished - 2013 Feb 20
Event2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012 - Kaohsiung, Taiwan
Duration: 2012 Nov 22012 Nov 6

Publication series

NameApplied Mechanics and Materials
Volume284-287
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Other

Other2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012
CountryTaiwan
CityKaohsiung
Period12-11-0212-11-06

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Liu, C-S., Lin, Y. C., & Hu, P. H. (2013). Design and characterization of precise laser-based autofocusing microscope with reduced geometrical fluctuations. In Innovation for Applied Science and Technology (pp. 672-676). (Applied Mechanics and Materials; Vol. 284-287). https://doi.org/10.4028/www.scientific.net/AMM.284-287.672