Design and control of a long-traveling nano-positioning stage

Chien Hung Liu, Wen Yuh Jywe, Yeau Ren Jeng, Tung Hui Hsu, Yi tsung Li

Research output: Contribution to journalArticle

63 Citations (Scopus)

Abstract

In this paper, a Dual-Axis Long-Traveling Nano-Positioning Stage (DALTNPS) is presented. In order to extend the traveling and increase the accuracy, the two sorts of stages, a traditional ball-screw stage and a three-degrees-of-freedom (3-DOF) piezo-stage, were composed. The traditional ball-screw stage which is composed of two guide-ways and a ball-screw at each axis is a long-travel stage, and the 3-DOF piezo-stage, which is composed of three piezoelectric actuators and four translation-rotation mechanisms, is a high precision stage. In addition, a 3-DOF measuring system and a PID controller are composed of a 3-DOF closed-loop controller and applied to implement the DALTNPS. The measuring system which is composed of two laser interferometers and two plane mirrors is a 3-DOF optical measuring system. Thus, the position at the x and y axes and the rotation around the z axis can be obtained and they are the responses of DALTNPS. Finally, the experiment results evidence that the DALTNPS is characterized by long-travel, high linear accuracy, high rotation accuracy, high contouring accuracy and high motion speed.

Original languageEnglish
Pages (from-to)497-506
Number of pages10
JournalPrecision Engineering
Volume34
Issue number3
DOIs
Publication statusPublished - 2010 Jul 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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