Design and control of a long-traveling nano-positioning stage

Chien Hung Liu, Wen Yuh Jywe, Yeau Ren Jeng, Tung Hui Hsu, Yi tsung Li

Research output: Contribution to journalArticlepeer-review

63 Citations (Scopus)

Fingerprint Dive into the research topics of 'Design and control of a long-traveling nano-positioning stage'. Together they form a unique fingerprint.

Engineering & Materials Science