Design and control of a one-dimensional stage based on elastomeric bearing technology

Yen Chu Teng, Kuo Shen Chen, Yu Cheng Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Precision motion control is vital for modern industrial applications. A controlled stage with both fast positioning and relative vibration suppression can improve either inspection efficiency or product quality. Recently, with the advancing in elastomer technology and utilizing the stiffness anisotropy, it is possible to integrate rubbers for providing both bearing and restoring forces in stage design for reducing the size and enhancing the dynamic performance. In this paper, a single-degree-of-freedom precision stage containing four silicone elastomeric bearings is designed and realized. Essential material characterizations are performed for quantifying the elastic and viscoelastic properties of materials and the system dynamics are modelled with time- and frequency-varying stiffness. A closed-loop control system comprising a voice coil motor as the actuator and a capacitance probe as the feedback position sensor is then realized. Here the Integral Sliding Mode controller is used in associated with the stage. In comparison with a previous compliant mechanism-based design, the stage size is reduced, the positioning stroke is increased from 101 μm to 139 μm, and the bandwidth is increased from 29 Hz to 350 Hz.

Original languageEnglish
Title of host publicationMESA 2016 - 12th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509061907
DOIs
Publication statusPublished - 2016 Oct 7
Event12th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2016 - Auckland, New Zealand
Duration: 2016 Aug 292016 Aug 31

Publication series

NameMESA 2016 - 12th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications - Conference Proceedings

Other

Other12th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2016
CountryNew Zealand
CityAuckland
Period16-08-2916-08-31

All Science Journal Classification (ASJC) codes

  • Biomedical Engineering
  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Control and Optimization

Fingerprint Dive into the research topics of 'Design and control of a one-dimensional stage based on elastomeric bearing technology'. Together they form a unique fingerprint.

  • Cite this

    Teng, Y. C., Chen, K. S., & Chen, Y. C. (2016). Design and control of a one-dimensional stage based on elastomeric bearing technology. In MESA 2016 - 12th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications - Conference Proceedings [7587136] (MESA 2016 - 12th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications - Conference Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MESA.2016.7587136