Design and fabrication of a micro-electro-mechanical system (MEMS) pressure sensor for rehabilitation engineering applications

Jyh Jier Ho, Y. K. Fang, S. F. Ting, G. S. Chen, Ming-Shaung Ju, M. C. Hsieh, Terry Yuan-Fang Chen, C. Y. Chen, K. H. Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Based on computer finite element analysis ANSYS 5.3 and micro-electro-mechanical systems (MEMS) technologies, a micro-pressure sensor was design and fabricated. The sensor can be used to measure the distribution of normal stress between soft tissues on an above-knee (AK) amputee's skin and the contacting surface of rehabilitation devices. In the developed sensor, a square membrane with 2400×2400×80 μm3 is formed by bulk photolithography of an n-type <100> monolithic silicon. On the middle of the membrane edge, an X-shape silicon was implanted with boron ions and then enhanced diffusion to as piezoresistive strain gauge. In the design process, a finite-element method is built to analyze the effects of pressure sensitivity and its temperature coefficients. The developed micro-pressure sensors, which have smaller weight and volume as compared to a conventional one, perform well and fit our design specifications.

Original languageEnglish
Title of host publicationAmerican Society of Mechanical Engineers, Bioengineering Division (Publication) BED
PublisherASME
Pages455-456
Number of pages2
Volume42
ISBN (Print)0791816117
Publication statusPublished - 1999 Dec 1
Event1999 Bioengineering Conference - Big Sky, MT, USA
Duration: 1999 Jun 161999 Jun 20

Other

Other1999 Bioengineering Conference
CityBig Sky, MT, USA
Period99-06-1699-06-20

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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