TY - GEN
T1 - Design and fabrication of a multi-degree-of-freedom microactuator using symmetric piezoelectric pusher element and its applications
AU - Shen, S. C.
AU - Chang, S. J.
AU - Pan, C. T.
AU - Huang, J. C.
AU - Tsai, P. C.
PY - 2012/12/1
Y1 - 2012/12/1
N2 - A novel multi-degree-of-freedom (MDOF) microactuator was developed using a symmetric piezoelectric plate and a Ni-Co alloy micro-pusher element. A LIGA-like technique was employed to manufacture a Ni-Co alloy micro-pusher with a Vickers hardness value (HV) of 550, which was then attached at the midpoint of the long side of a piezoelectric plate with dual electrodes to construct a symmetric piezoelectric pusher element (SPPE). The research integrated the concept of LEGO® bricks, and three different vibration modes of the SPPE were designed to develop a high-power MDOF motion platform, which was able to rotate a spherical device along three perpendicular axes. This MDOF microactuator consisted of a stator and a rotor: the stator was created from two mutually orthogonal sets of parallel SPPEs to form a MDOF motion platform, and the rotor was a spherical device. The experiment demonstrated the high-power MDOF eyeball-like microactuator working frequencies along the X-, Y-, and Z-axes to be 223.4 kHz, 223.2 kHz, and 225 kHz and the rotation speeds to reach 50 rpm, 52 rpm, and 180 rpm, respectively, at a driving voltage of 30Vpp. In the future, this MODF eyeball-like microactuator may be used for a number of applications, such as sun-tracking systems for green energy harvesters and eyeball-like devices for use in the biomedical field.
AB - A novel multi-degree-of-freedom (MDOF) microactuator was developed using a symmetric piezoelectric plate and a Ni-Co alloy micro-pusher element. A LIGA-like technique was employed to manufacture a Ni-Co alloy micro-pusher with a Vickers hardness value (HV) of 550, which was then attached at the midpoint of the long side of a piezoelectric plate with dual electrodes to construct a symmetric piezoelectric pusher element (SPPE). The research integrated the concept of LEGO® bricks, and three different vibration modes of the SPPE were designed to develop a high-power MDOF motion platform, which was able to rotate a spherical device along three perpendicular axes. This MDOF microactuator consisted of a stator and a rotor: the stator was created from two mutually orthogonal sets of parallel SPPEs to form a MDOF motion platform, and the rotor was a spherical device. The experiment demonstrated the high-power MDOF eyeball-like microactuator working frequencies along the X-, Y-, and Z-axes to be 223.4 kHz, 223.2 kHz, and 225 kHz and the rotation speeds to reach 50 rpm, 52 rpm, and 180 rpm, respectively, at a driving voltage of 30Vpp. In the future, this MODF eyeball-like microactuator may be used for a number of applications, such as sun-tracking systems for green energy harvesters and eyeball-like devices for use in the biomedical field.
UR - http://www.scopus.com/inward/record.url?scp=84874261779&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84874261779&partnerID=8YFLogxK
U2 - 10.1109/SII.2012.6427389
DO - 10.1109/SII.2012.6427389
M3 - Conference contribution
AN - SCOPUS:84874261779
SN - 9781467314961
T3 - 2012 IEEE/SICE International Symposium on System Integration, SII 2012
SP - 686
EP - 691
BT - 2012 IEEE/SICE International Symposium on System Integration, SII 2012
T2 - 2012 IEEE/SICE International Symposium on System Integration, SII 2012
Y2 - 16 December 2012 through 18 December 2012
ER -