Design and fabrication of a novel tri-axis micro-gyroscope

Nan-Chyuan Tsai; Chung Yang Sue; Chih Che Lin

doi:10.1109/NEMS.2008.4484371

Design and fabrication of a novel tri-axis micro-gyroscope

Nan-Chyuan Tsai, Chung Yang Sue, Chih Che Lin

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

This paper presents an innovative micro-gyroscope which possesses the capability of detecting tri-axis angular motions. The coupling effect of the tri-axis angular rates due to Coriolis acceleration and nonlinearity of the high frequency modes can be efficiently reduced by the decoupled mechanical structure design. In order to ensure further repeatability and reliability, the suspension flexures and stiffness are examined by Finite Element Method (FEM) and compared with simplified mathematical analysis by conventional beam deformation theories. Finally, the sensitivity and nonlinearity of tri-axis gyroscopes are theoretically investigated and evaluated.

Original language	English
Title of host publication	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Pages	457-461
Number of pages	5
DOIs	https://doi.org/10.1109/NEMS.2008.4484371
Publication status	Published - 2008 Sep 1
Event	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China Duration: 2008 Jan 6 → 2008 Jan 9

Publication series

Name	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Other

Other	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Country/Territory	China
City	Sanya
Period	08-01-06 → 08-01-09

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2008.4484371

Cite this

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title = "Design and fabrication of a novel tri-axis micro-gyroscope",

abstract = "This paper presents an innovative micro-gyroscope which possesses the capability of detecting tri-axis angular motions. The coupling effect of the tri-axis angular rates due to Coriolis acceleration and nonlinearity of the high frequency modes can be efficiently reduced by the decoupled mechanical structure design. In order to ensure further repeatability and reliability, the suspension flexures and stiffness are examined by Finite Element Method (FEM) and compared with simplified mathematical analysis by conventional beam deformation theories. Finally, the sensitivity and nonlinearity of tri-axis gyroscopes are theoretically investigated and evaluated.",

author = "Nan-Chyuan Tsai and Sue, {Chung Yang} and Lin, {Chih Che}",

year = "2008",

month = sep,

day = "1",

doi = "10.1109/NEMS.2008.4484371",

language = "English",

isbn = "9781424419081",

series = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS",

pages = "457--461",

booktitle = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008",

note = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 ; Conference date: 06-01-2008 Through 09-01-2008",

}

Tsai, N-C, Sue, CY & Lin, CC 2008, Design and fabrication of a novel tri-axis micro-gyroscope. in 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008., 4484371, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS, pp. 457-461, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, Sanya, China, 08-01-06. https://doi.org/10.1109/NEMS.2008.4484371

Design and fabrication of a novel tri-axis micro-gyroscope. / Tsai, Nan-Chyuan; Sue, Chung Yang; Lin, Chih Che.

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. 2008. p. 457-461 4484371 (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Design and fabrication of a novel tri-axis micro-gyroscope

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AU - Sue, Chung Yang

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N2 - This paper presents an innovative micro-gyroscope which possesses the capability of detecting tri-axis angular motions. The coupling effect of the tri-axis angular rates due to Coriolis acceleration and nonlinearity of the high frequency modes can be efficiently reduced by the decoupled mechanical structure design. In order to ensure further repeatability and reliability, the suspension flexures and stiffness are examined by Finite Element Method (FEM) and compared with simplified mathematical analysis by conventional beam deformation theories. Finally, the sensitivity and nonlinearity of tri-axis gyroscopes are theoretically investigated and evaluated.

AB - This paper presents an innovative micro-gyroscope which possesses the capability of detecting tri-axis angular motions. The coupling effect of the tri-axis angular rates due to Coriolis acceleration and nonlinearity of the high frequency modes can be efficiently reduced by the decoupled mechanical structure design. In order to ensure further repeatability and reliability, the suspension flexures and stiffness are examined by Finite Element Method (FEM) and compared with simplified mathematical analysis by conventional beam deformation theories. Finally, the sensitivity and nonlinearity of tri-axis gyroscopes are theoretically investigated and evaluated.

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DO - 10.1109/NEMS.2008.4484371

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T3 - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

SP - 457

EP - 461

BT - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008

T2 - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008

Y2 - 6 January 2008 through 9 January 2008

ER -

Design and fabrication of a novel tri-axis micro-gyroscope

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