Design and fabrication of a novel tri-axis micro-gyroscope

Nan-Chyuan Tsai, Chung Yang Sue, Chih Che Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper presents an innovative micro-gyroscope which possesses the capability of detecting tri-axis angular motions. The coupling effect of the tri-axis angular rates due to Coriolis acceleration and nonlinearity of the high frequency modes can be efficiently reduced by the decoupled mechanical structure design. In order to ensure further repeatability and reliability, the suspension flexures and stiffness are examined by Finite Element Method (FEM) and compared with simplified mathematical analysis by conventional beam deformation theories. Finally, the sensitivity and nonlinearity of tri-axis gyroscopes are theoretically investigated and evaluated.

Original languageEnglish
Title of host publication3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Pages457-461
Number of pages5
DOIs
Publication statusPublished - 2008 Sep 1
Event3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China
Duration: 2008 Jan 62008 Jan 9

Publication series

Name3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Other

Other3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
CountryChina
CitySanya
Period08-01-0608-01-09

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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