TY - JOUR
T1 - Design and fabrication of a valveless micropump based on low temperature co-fired ceramic tape technology
AU - Huang, Chi Mo
AU - Wang, Yi Chun
N1 - Funding Information:
The study was supported financially by the National Science Council in Taiwan (NSC 98-2221-E-006-169-MY2). Authors are grateful for help from Dr. Ming-Hsun Wu in fabricating the LTCC micropump, research advice from Dr. Yung-Chun Lee and editorial support from Dr. Hsiao-Wen Lin.
PY - 2014/6
Y1 - 2014/6
N2 - Low temperature co-fired ceramic (LTCC) tape technology has been widely studied in microsystems and microfluidic devices. The current study presented the manufacturing process of a simple and inexpensive micropump which is made of LTCC. The components of micropump including fluidic channels, diaphragm, chamber, and planar diffuser valves were integrated in one LTCC module. Geometries of these components were designed based on numerical analysis. The finite element analysis was used to characterize the displacement of a piezoelectric actuator and the computational fluid dynamics was applied to design the diffuser. The performance of the micropump was optimized and performance of the designed micropump was carefully examined in the experiments. The data revealed that the performance of a micropump can be significantly increased by adding a pair of pockets. Overall, the study demonstrated that LTCC tape technology is a simple and reliable method to fabricate a valveless micropump.
AB - Low temperature co-fired ceramic (LTCC) tape technology has been widely studied in microsystems and microfluidic devices. The current study presented the manufacturing process of a simple and inexpensive micropump which is made of LTCC. The components of micropump including fluidic channels, diaphragm, chamber, and planar diffuser valves were integrated in one LTCC module. Geometries of these components were designed based on numerical analysis. The finite element analysis was used to characterize the displacement of a piezoelectric actuator and the computational fluid dynamics was applied to design the diffuser. The performance of the micropump was optimized and performance of the designed micropump was carefully examined in the experiments. The data revealed that the performance of a micropump can be significantly increased by adding a pair of pockets. Overall, the study demonstrated that LTCC tape technology is a simple and reliable method to fabricate a valveless micropump.
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U2 - 10.1007/s00542-013-1909-6
DO - 10.1007/s00542-013-1909-6
M3 - Article
AN - SCOPUS:84901608309
SN - 0946-7076
VL - 20
SP - 1111
EP - 1123
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 6
ER -