Abstract
A novel microactuator has presented by this research. The high power electromagnetic microactuator combines of innovative hard magnetic Fe/Pt process, high Ni/Fe permalloy magnetic circuit design technique, bulk micromachming and excimer laser ablation. The hard magnetic material is Fe/Pt which is deposited under low temperature by sputter on the suspension diaphragm to offer perpendicular magnetic anisotropy field. The magnetic circuit with close loop is applied to concentrate the magnetic flux and increases magnetic force. Therefore, the magnetic field induced by the magnetic field of the planar coil and Ni/Fe permalloy can be enhanced, which will interact with Fe/Pt and induce huge displacement, large force output and high frequency. The high power electromagnetic microactuator has been demonstrated magnetic force 2 times larger than conventional magnetic microactuator.
| Original language | English |
|---|---|
| Title of host publication | Micro-Electro-Mechanical Systems (MEMS) - 2001 |
| Editors | A.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn |
| Pages | 185-190 |
| Number of pages | 6 |
| Volume | 3 |
| Publication status | Published - 2001 |
| Event | 2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States Duration: 2001 Nov 11 → 2001 Nov 16 |
Other
| Other | 2001 ASME International Mechanical Engineering Congress and Exposition |
|---|---|
| Country/Territory | United States |
| City | New York, NY |
| Period | 01-11-11 → 01-11-16 |
All Science Journal Classification (ASJC) codes
- Engineering(all)