Design and fabrication of high power electromagnetic microactuator with perpendicular magnetic anisotropy

C. T. Pan, Sheng-Chih Shen, H. P. Chou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel microactuator has presented by this research. The high power electromagnetic microactuator combines of innovative hard magnetic Fe/Pt process, high Ni/Fe permalloy magnetic circuit design technique, bulk micromachming and excimer laser ablation. The hard magnetic material is Fe/Pt which is deposited under low temperature by sputter on the suspension diaphragm to offer perpendicular magnetic anisotropy field. The magnetic circuit with close loop is applied to concentrate the magnetic flux and increases magnetic force. Therefore, the magnetic field induced by the magnetic field of the planar coil and Ni/Fe permalloy can be enhanced, which will interact with Fe/Pt and induce huge displacement, large force output and high frequency. The high power electromagnetic microactuator has been demonstrated magnetic force 2 times larger than conventional magnetic microactuator.

Original languageEnglish
Title of host publicationMicro-Electro-Mechanical Systems (MEMS) - 2001
EditorsA.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn
Pages185-190
Number of pages6
Volume3
Publication statusPublished - 2001
Event2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States
Duration: 2001 Nov 112001 Nov 16

Other

Other2001 ASME International Mechanical Engineering Congress and Exposition
CountryUnited States
CityNew York, NY
Period01-11-1101-11-16

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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