Design and fabrication of micro oxygen sensor

Chia Yen Lee, Long Kai Lin Liou, Chin Lung Chang, Chang Hsing Tai, Lung-Ming Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the study, a MEMS-based gas sensor is presented, which consists of a sensing thin film deposited by RF sputtering and annealed at 375°C. The structure and surface pattern of the thin film are analyzed by XRD and SEM. The sensor consists of a substrate, Pt interdigitated electrodes and an SnO 2 sensing layer. As concentration of oxygen changes, a change in the electrical conductivity of the SnO2 film is caused. The experimental results show that the measured resistance increases as the concentration of oxygen increases at a working temperature of 300°C. A good oxygen sensing performance is presented in the study.

Original languageEnglish
Title of host publicationMEMS/NEMS Nano Technology
Pages237-242
Number of pages6
DOIs
Publication statusPublished - 2011 Aug 1
Event12th Annual Conference of the Chinese Society of Micro-Nano Technology, CSMNT and 2nd International Conference of Chinese Society of Micro-Nano Technology - Xi'an, China
Duration: 2010 Oct 222010 Oct 24

Publication series

NameKey Engineering Materials
Volume483
ISSN (Print)1013-9826

Other

Other12th Annual Conference of the Chinese Society of Micro-Nano Technology, CSMNT and 2nd International Conference of Chinese Society of Micro-Nano Technology
CountryChina
CityXi'an
Period10-10-2210-10-24

Fingerprint

Oxygen sensors
Oxygen
Fabrication
Thin films
Chemical sensors
MEMS
Sputtering
Scanning electron microscopy
Electrodes
Sensors
Substrates
Temperature

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Lee, C. Y., Lin Liou, L. K., Chang, C. L., Tai, C. H., & Fu, L-M. (2011). Design and fabrication of micro oxygen sensor. In MEMS/NEMS Nano Technology (pp. 237-242). (Key Engineering Materials; Vol. 483). https://doi.org/10.4028/www.scientific.net/KEM.483.237
Lee, Chia Yen ; Lin Liou, Long Kai ; Chang, Chin Lung ; Tai, Chang Hsing ; Fu, Lung-Ming. / Design and fabrication of micro oxygen sensor. MEMS/NEMS Nano Technology. 2011. pp. 237-242 (Key Engineering Materials).
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Lee, CY, Lin Liou, LK, Chang, CL, Tai, CH & Fu, L-M 2011, Design and fabrication of micro oxygen sensor. in MEMS/NEMS Nano Technology. Key Engineering Materials, vol. 483, pp. 237-242, 12th Annual Conference of the Chinese Society of Micro-Nano Technology, CSMNT and 2nd International Conference of Chinese Society of Micro-Nano Technology, Xi'an, China, 10-10-22. https://doi.org/10.4028/www.scientific.net/KEM.483.237

Design and fabrication of micro oxygen sensor. / Lee, Chia Yen; Lin Liou, Long Kai; Chang, Chin Lung; Tai, Chang Hsing; Fu, Lung-Ming.

MEMS/NEMS Nano Technology. 2011. p. 237-242 (Key Engineering Materials; Vol. 483).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - In the study, a MEMS-based gas sensor is presented, which consists of a sensing thin film deposited by RF sputtering and annealed at 375°C. The structure and surface pattern of the thin film are analyzed by XRD and SEM. The sensor consists of a substrate, Pt interdigitated electrodes and an SnO 2 sensing layer. As concentration of oxygen changes, a change in the electrical conductivity of the SnO2 film is caused. The experimental results show that the measured resistance increases as the concentration of oxygen increases at a working temperature of 300°C. A good oxygen sensing performance is presented in the study.

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Lee CY, Lin Liou LK, Chang CL, Tai CH, Fu L-M. Design and fabrication of micro oxygen sensor. In MEMS/NEMS Nano Technology. 2011. p. 237-242. (Key Engineering Materials). https://doi.org/10.4028/www.scientific.net/KEM.483.237