Design and fabrication of micro oxygen sensor

Chia Yen Lee, Long Kai Lin Liou, Chin Lung Chang, Chang Hsing Tai, Lung Ming Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In the study, a MEMS-based gas sensor is presented, which consists of a sensing thin film deposited by RF sputtering and annealed at 375°C. The structure and surface pattern of the thin film are analyzed by XRD and SEM. The sensor consists of a substrate, Pt interdigitated electrodes and an SnO 2 sensing layer. As concentration of oxygen changes, a change in the electrical conductivity of the SnO2 film is caused. The experimental results show that the measured resistance increases as the concentration of oxygen increases at a working temperature of 300°C. A good oxygen sensing performance is presented in the study.

Original languageEnglish
Title of host publicationMEMS/NEMS Nano Technology
PublisherTrans Tech Publications Ltd
Number of pages6
ISBN (Print)9783037851753
Publication statusPublished - 2011

Publication series

NameKey Engineering Materials
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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