Design and fabrication of microfluidic devices integrated with an open-ended MEMS probe for single-cell impedance measurement

Ling-Sheng Jang, Hsin Hung Li, Jen Yu Jao, Ming Kun Chen, Chia Feng Liu

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

When an electrical current with a low frequency is applied to a cell, the current passes through the outside of the cell. Thus, impedance measurements at low frequencies cannot be used to determine the pathological change of the cellular organelle taking place inside the cell. However, increasing the frequency of the electrical current makes the capacitive impedance of the cell decrease, allowing the electrical current to flow through the cell. This study presents the design and fabrication of a microfluidic device integrated with a coplanar waveguide open-ended micro-electro-mechanical-systems (MEMS) probe for the impedance measurement of the single HeLa cell in frequencies between 1 MHz and 1 GHz. The device includes a poly-dimethlysiloxane (PDMS) cover with a microchannel and microstructures to capture the single HeLa cell and a conductor-backed CPW fabricated using a silicon chip and two printed circuit boards (PCB). The effects of the substrate on the characteristic impedance of the conductor-backed coplanar waveguide (CBCPW) structure were investigated under three conditions by utilizing a time-domain reflectometer (TDR). Finally, impedance measurements using the proposed device and a vector network analyzer (VNA) are demonstrated for de-ionized (DI) water, alcohol, PBS, and a single HeLa cell.

Original languageEnglish
Pages (from-to)509-519
Number of pages11
JournalMicrofluidics and Nanofluidics
Volume8
Issue number4
DOIs
Publication statusPublished - 2010 Apr 1

Fingerprint

microfluidic devices
impedance measurement
Microfluidics
Coplanar waveguides
Fabrication
fabrication
probes
cells
Electric network analyzers
Reflectometers
Silicon
Microchannels
Printed circuit boards
Alcohols
Microstructure
conductors
Water
impedance
Substrates
low frequencies

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Materials Chemistry

Cite this

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Design and fabrication of microfluidic devices integrated with an open-ended MEMS probe for single-cell impedance measurement. / Jang, Ling-Sheng; Li, Hsin Hung; Jao, Jen Yu; Chen, Ming Kun; Liu, Chia Feng.

In: Microfluidics and Nanofluidics, Vol. 8, No. 4, 01.04.2010, p. 509-519.

Research output: Contribution to journalArticle

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