Design and Fabrication of Ozone Sensor based on WO3thin film

Yi Cheng Hung; Zih Yue Lin; Lung Ming Fu; Chia Yen Lee

doi:10.1109/ICASI57738.2023.10179582

Design and Fabrication of Ozone Sensor based on WO₃thin film

Yi Cheng Hung
, Zih Yue Lin
, Lung Ming Fu
, Chia Yen Lee

Department of Engineering Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A Micro-Electro-Mechanical Systems based tungsten trioxide thin film micro-ozone sensor is prepared using physical vapor deposition techniques. Given a sufficiently high working temperature, the resistance of the tungsten trioxide film increases linearly with an increasing ozone concentration. The effects of variations in the working temperature on the resistance of the tungsten trioxide sensing layer are suppressed by a PID feedback control system implemented in LabVIEW. It is shown that a working temperature of 250°C results in the device's maximum sensitivity (3.32 MΩ/ppm) and minimum response time (17 seconds).

Original language	English
Title of host publication	2023 9th International Conference on Applied System Innovation, ICASI 2023
Editors	Shoou-Jinn Chang, Sheng-Joue Young, Artde Donald Kin-Tak Lam, Liang-Wen Ji, Stephen D. Prior
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	190-192
Number of pages	3
ISBN (Electronic)	9798350398380
DOIs	https://doi.org/10.1109/ICASI57738.2023.10179582
Publication status	Published - 2023
Event	9th International Conference on Applied System Innovation, ICASI 2023 - Chiba, Japan Duration: 2023 Apr 21 → 2023 Apr 25

Publication series

Name	2023 9th International Conference on Applied System Innovation, ICASI 2023

Conference

Conference	9th International Conference on Applied System Innovation, ICASI 2023
Country/Territory	Japan
City	Chiba
Period	23-04-21 → 23-04-25

All Science Journal Classification (ASJC) codes

Artificial Intelligence
Computer Science Applications
Hardware and Architecture
Information Systems
Information Systems and Management
Electrical and Electronic Engineering
Mechanical Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/ICASI57738.2023.10179582

Cite this

Hung, Y. C., Lin, Z. Y., Fu, L. M., & Lee, C. Y. (2023). Design and Fabrication of Ozone Sensor based on WO₃thin film. In S.-J. Chang, S.-J. Young, A. D. K.-T. Lam, L.-W. Ji, & S. D. Prior (Eds.), 2023 9th International Conference on Applied System Innovation, ICASI 2023 (pp. 190-192). (2023 9th International Conference on Applied System Innovation, ICASI 2023). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICASI57738.2023.10179582

Hung, Yi Cheng ; Lin, Zih Yue ; Fu, Lung Ming et al. / Design and Fabrication of Ozone Sensor based on WO₃thin film. 2023 9th International Conference on Applied System Innovation, ICASI 2023. editor / Shoou-Jinn Chang ; Sheng-Joue Young ; Artde Donald Kin-Tak Lam ; Liang-Wen Ji ; Stephen D. Prior. Institute of Electrical and Electronics Engineers Inc., 2023. pp. 190-192 (2023 9th International Conference on Applied System Innovation, ICASI 2023).

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title = "Design and Fabrication of Ozone Sensor based on WO3thin film",

abstract = "A Micro-Electro-Mechanical Systems based tungsten trioxide thin film micro-ozone sensor is prepared using physical vapor deposition techniques. Given a sufficiently high working temperature, the resistance of the tungsten trioxide film increases linearly with an increasing ozone concentration. The effects of variations in the working temperature on the resistance of the tungsten trioxide sensing layer are suppressed by a PID feedback control system implemented in LabVIEW. It is shown that a working temperature of 250°C results in the device's maximum sensitivity (3.32 MΩ/ppm) and minimum response time (17 seconds).",

author = "Hung, \{Yi Cheng\} and Lin, \{Zih Yue\} and Fu, \{Lung Ming\} and Lee, \{Chia Yen\}",

note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 9th International Conference on Applied System Innovation, ICASI 2023 ; Conference date: 21-04-2023 Through 25-04-2023",

year = "2023",

doi = "10.1109/ICASI57738.2023.10179582",

language = "English",

series = "2023 9th International Conference on Applied System Innovation, ICASI 2023",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "190--192",

editor = "Shoou-Jinn Chang and Sheng-Joue Young and Lam, \{Artde Donald Kin-Tak\} and Liang-Wen Ji and Prior, \{Stephen D.\}",

booktitle = "2023 9th International Conference on Applied System Innovation, ICASI 2023",

address = "United States",

}

Hung, YC, Lin, ZY, Fu, LM & Lee, CY 2023, Design and Fabrication of Ozone Sensor based on WO₃thin film. in S-J Chang, S-J Young, ADK-T Lam, L-W Ji & SD Prior (eds), 2023 9th International Conference on Applied System Innovation, ICASI 2023. 2023 9th International Conference on Applied System Innovation, ICASI 2023, Institute of Electrical and Electronics Engineers Inc., pp. 190-192, 9th International Conference on Applied System Innovation, ICASI 2023, Chiba, Japan, 23-04-21. https://doi.org/10.1109/ICASI57738.2023.10179582

Design and Fabrication of Ozone Sensor based on WO₃thin film. / Hung, Yi Cheng; Lin, Zih Yue; Fu, Lung Ming et al.
2023 9th International Conference on Applied System Innovation, ICASI 2023. ed. / Shoou-Jinn Chang; Sheng-Joue Young; Artde Donald Kin-Tak Lam; Liang-Wen Ji; Stephen D. Prior. Institute of Electrical and Electronics Engineers Inc., 2023. p. 190-192 (2023 9th International Conference on Applied System Innovation, ICASI 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

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AU - Hung, Yi Cheng

AU - Lin, Zih Yue

AU - Fu, Lung Ming

AU - Lee, Chia Yen

PY - 2023

Y1 - 2023

N2 - A Micro-Electro-Mechanical Systems based tungsten trioxide thin film micro-ozone sensor is prepared using physical vapor deposition techniques. Given a sufficiently high working temperature, the resistance of the tungsten trioxide film increases linearly with an increasing ozone concentration. The effects of variations in the working temperature on the resistance of the tungsten trioxide sensing layer are suppressed by a PID feedback control system implemented in LabVIEW. It is shown that a working temperature of 250°C results in the device's maximum sensitivity (3.32 MΩ/ppm) and minimum response time (17 seconds).

AB - A Micro-Electro-Mechanical Systems based tungsten trioxide thin film micro-ozone sensor is prepared using physical vapor deposition techniques. Given a sufficiently high working temperature, the resistance of the tungsten trioxide film increases linearly with an increasing ozone concentration. The effects of variations in the working temperature on the resistance of the tungsten trioxide sensing layer are suppressed by a PID feedback control system implemented in LabVIEW. It is shown that a working temperature of 250°C results in the device's maximum sensitivity (3.32 MΩ/ppm) and minimum response time (17 seconds).

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U2 - 10.1109/ICASI57738.2023.10179582

DO - 10.1109/ICASI57738.2023.10179582

M3 - Conference contribution

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BT - 2023 9th International Conference on Applied System Innovation, ICASI 2023

A2 - Chang, Shoou-Jinn

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A2 - Ji, Liang-Wen

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PB - Institute of Electrical and Electronics Engineers Inc.

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Hung YC, Lin ZY, Fu LM, Lee CY. Design and Fabrication of Ozone Sensor based on WO₃thin film. In Chang SJ, Young SJ, Lam ADKT, Ji LW, Prior SD, editors, 2023 9th International Conference on Applied System Innovation, ICASI 2023. Institute of Electrical and Electronics Engineers Inc. 2023. p. 190-192. (2023 9th International Conference on Applied System Innovation, ICASI 2023). doi: 10.1109/ICASI57738.2023.10179582