Design and fabrication of single-walled carbon nanonet flexible strain sensors

Ya Ting Huang, Shyh Chour Huang, Chih Chao Hsu, Ru Min Chao, Trung Kien Vu

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.

Original languageEnglish
Pages (from-to)3269-3280
Number of pages12
JournalSensors
Volume12
Issue number3
DOIs
Publication statusPublished - 2012 Mar

All Science Journal Classification (ASJC) codes

  • Analytical Chemistry
  • Biochemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Electrical and Electronic Engineering

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