Design and fabrication of single-walled carbon nanonet flexible strain sensors

Ya Ting Huang, Shyh Chour Huang, Chih Chao Hsu, Ru-Min Chao, Trung Kien Vu

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.

Original languageEnglish
Pages (from-to)3269-3280
Number of pages12
JournalSensors
Volume12
Issue number3
DOIs
Publication statusPublished - 2012 Mar 1

Fingerprint

Gages
Carbon
Fabrication
fabrication
carbon
sensors
Sensors
Alcohols
Microfabrication
Growth
polyimides
Polyimides
Linewidth
Chemical vapor deposition
alcohols
vapor deposition
parylene

All Science Journal Classification (ASJC) codes

  • Analytical Chemistry
  • Atomic and Molecular Physics, and Optics
  • Biochemistry
  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Huang, Ya Ting ; Huang, Shyh Chour ; Hsu, Chih Chao ; Chao, Ru-Min ; Vu, Trung Kien. / Design and fabrication of single-walled carbon nanonet flexible strain sensors. In: Sensors. 2012 ; Vol. 12, No. 3. pp. 3269-3280.
@article{c31054ac71964d9486ffd0804bd51054,
title = "Design and fabrication of single-walled carbon nanonet flexible strain sensors",
abstract = "This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.",
author = "Huang, {Ya Ting} and Huang, {Shyh Chour} and Hsu, {Chih Chao} and Ru-Min Chao and Vu, {Trung Kien}",
year = "2012",
month = "3",
day = "1",
doi = "10.3390/s120303269",
language = "English",
volume = "12",
pages = "3269--3280",
journal = "Sensors",
issn = "1424-3210",
publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",
number = "3",

}

Design and fabrication of single-walled carbon nanonet flexible strain sensors. / Huang, Ya Ting; Huang, Shyh Chour; Hsu, Chih Chao; Chao, Ru-Min; Vu, Trung Kien.

In: Sensors, Vol. 12, No. 3, 01.03.2012, p. 3269-3280.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Design and fabrication of single-walled carbon nanonet flexible strain sensors

AU - Huang, Ya Ting

AU - Huang, Shyh Chour

AU - Hsu, Chih Chao

AU - Chao, Ru-Min

AU - Vu, Trung Kien

PY - 2012/3/1

Y1 - 2012/3/1

N2 - This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.

AB - This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.

UR - http://www.scopus.com/inward/record.url?scp=84858978659&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84858978659&partnerID=8YFLogxK

U2 - 10.3390/s120303269

DO - 10.3390/s120303269

M3 - Article

C2 - 22737007

AN - SCOPUS:84858978659

VL - 12

SP - 3269

EP - 3280

JO - Sensors

JF - Sensors

SN - 1424-3210

IS - 3

ER -