TY - GEN
T1 - Design and Simulation of High-Bandwidth 4-DOF Fast Steering Mirror
AU - Liu, Chien Sheng
AU - Jiang, Kun Cheng
AU - Chen, Ming Fu
AU - Lin, Po Ming
N1 - Publisher Copyright:
© 2023 The Korean Institute of Power Electronics.
PY - 2023
Y1 - 2023
N2 - The accuracy and stability of the laser are affected not only by the external environment, but also by laser structure, heat source, input source, etc., resulting in four-degree-of-freedom (4-DOF) fluctuation errors. To reduce the laser fluctuation errors and improve laser quality, this study proposes a high-bandwidth 4-DOF fast steering mirror (FSM) with double Porro prisms driven by a voice coil motor (VCM), and has the advantage of shorter optical path length, fewer elements, and easier set-up at different locations in laser beam stabilization. The proposed 4-DOF FSM is verified by using the finite element analysis software ANSYS and MATLAB/Simulink. The proposed 4-DOF FSM has the movement range of ±0.1 mm and ±5 mrad along X and Y axis, respectively; the open-loop bandwidths of translational part and rotational part are 111 Hz and 113 Hz, respectively; and the closed-loop bandwidths of translational part and rotational part are 371 Hz and 379 Hz, respectively.
AB - The accuracy and stability of the laser are affected not only by the external environment, but also by laser structure, heat source, input source, etc., resulting in four-degree-of-freedom (4-DOF) fluctuation errors. To reduce the laser fluctuation errors and improve laser quality, this study proposes a high-bandwidth 4-DOF fast steering mirror (FSM) with double Porro prisms driven by a voice coil motor (VCM), and has the advantage of shorter optical path length, fewer elements, and easier set-up at different locations in laser beam stabilization. The proposed 4-DOF FSM is verified by using the finite element analysis software ANSYS and MATLAB/Simulink. The proposed 4-DOF FSM has the movement range of ±0.1 mm and ±5 mrad along X and Y axis, respectively; the open-loop bandwidths of translational part and rotational part are 111 Hz and 113 Hz, respectively; and the closed-loop bandwidths of translational part and rotational part are 371 Hz and 379 Hz, respectively.
UR - http://www.scopus.com/inward/record.url?scp=85170639212&partnerID=8YFLogxK
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U2 - 10.23919/ICPE2023-ECCEAsia54778.2023.10213724
DO - 10.23919/ICPE2023-ECCEAsia54778.2023.10213724
M3 - Conference contribution
AN - SCOPUS:85170639212
T3 - ICPE 2023-ECCE Asia - 11th International Conference on Power Electronics - ECCE Asia: Green World with Power Electronics
SP - 2312
EP - 2317
BT - ICPE 2023-ECCE Asia - 11th International Conference on Power Electronics - ECCE Asia
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 11th International Conference on Power Electronics - ECCE Asia, ICPE 2023-ECCE Asia
Y2 - 22 May 2023 through 25 May 2023
ER -