TY - JOUR
T1 - Design consideration and fabrication of a microchannel system containing a set of heaters and an array of temperature sensors
AU - Liu, Chien Wei
AU - Gau, Chie
AU - Liu, Chin Gi
AU - Yang, Chin Sheng
N1 - Funding Information:
This research was sponsored by both the National Science Council of Taiwan under contract no. NSC 91-2212-E-006-108 and the National Nano Device Laboratories (NDL) under contract no. NDL 91S-C-062.
PY - 2005/8/26
Y1 - 2005/8/26
N2 - The objective of this paper is to present several possible design considerations and a fabrication process for a complicated microchannel system that contains a set of heaters, and an array of temperature sensors. The completed channel is tested and presented in this paper. This microchannel can allow liquid or air flow through the channel and the measured signals from these temperature sensors can be used to study the microthermal and flow transport processes. Information for the microflow and the heat transfer process is very important for the basic understanding in IC chip cooling. Both the insulation of the channel and uniform heating of the heater are also considered and analyzed in this paper so that an accurate heat transfer data can be obtained.
AB - The objective of this paper is to present several possible design considerations and a fabrication process for a complicated microchannel system that contains a set of heaters, and an array of temperature sensors. The completed channel is tested and presented in this paper. This microchannel can allow liquid or air flow through the channel and the measured signals from these temperature sensors can be used to study the microthermal and flow transport processes. Information for the microflow and the heat transfer process is very important for the basic understanding in IC chip cooling. Both the insulation of the channel and uniform heating of the heater are also considered and analyzed in this paper so that an accurate heat transfer data can be obtained.
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U2 - 10.1016/j.sna.2005.04.016
DO - 10.1016/j.sna.2005.04.016
M3 - Article
AN - SCOPUS:23444438199
SN - 0924-4247
VL - 122
SP - 177
EP - 183
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 2
ER -