@inproceedings{62a777590ecc40e1b0df9ef8ef8fb4fb,
title = "Design of a 0.6-V 0.2-mW CMOS MEMS accelerometer",
abstract = "This paper presents a low-voltage low-power monolithic complementary metal-oxide-semiconductor (CMOS) micro-electromechanical-system (MEMS) accelerometer design. This design utilizes low-voltage design techniques without using low-threshold devices or internal supply voltage boosting. The accelerometer, designed in the 0.18-μm CMOS MEMS process, contains the micro-mechanical structure, readout circuits, and a 16-bit delta-sigma analog-to-digital converter (ΔΣ ADC). It occupies an area of only 0.8 × 1 mm2 and draws 0.33 mA of current from a 0.6-V supply. The simulated sensitivity is 3000 LSB/g and the nonlinearity is 0.78\% within the ±6 g sensing range.",
author = "Wu, \{Po Chang\} and Liu, \{Bin Da\} and Yeh, \{Chih Yuan\} and Tseng, \{Sheg Hsiang\} and Tsai, \{Hann Huei\} and Juang, \{Ying Zong\}",
year = "2015",
month = aug,
day = "20",
doi = "10.1109/ICCE-TW.2015.7216989",
language = "English",
series = "2015 IEEE International Conference on Consumer Electronics - Taiwan, ICCE-TW 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "444--445",
booktitle = "2015 IEEE International Conference on Consumer Electronics - Taiwan, ICCE-TW 2015",
address = "United States",
note = "2nd IEEE International Conference on Consumer Electronics - Taiwan, ICCE-TW 2015 ; Conference date: 06-06-2015 Through 08-06-2015",
}