Design of electromagnetic drive module for micro-gyroscope

For micro-gyroscopes, the angular rate detection components have to oscillate forwards and backwards alternatively. An innovative design of micro-electromagnetic drive module is proposed to make a Π-type disc reciprocally and efficiently rotate within a certain of angular interval. Twelve Electromagnetic poles enclosing the thin disc are designed to provide the magnetic drive power. Isotropic etching technique is employed to fabricate the high-aspect-ratio trench, so that the contact angle of wire against trench can be increased and the potential defect of cavities and pores within the wire can be prevented. On the other hand, a Π-type thin disc is designed to conduct the pitch motion as an angular excitation, in addition to spinning, is exerted on the gyroscope. The efficacy of the micro-magnetic drive module is verified by the commercial software, Ansoft Maxewll. In comparison with the conventional planar windings in micro-scale systems, the magnetic drive force is increased by 150%.