Design of micro-retainer to counter-balance spinning seismic proof mass

Nan Chyuan Tsai, Bing Hong Liou, Chih Che Lin

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


An innovative magnetic module which is concurrently capable of performing as an actuator and a sensor is proposed and analyzed. The magnetic module is basically similar to a micro-scale Linear Variable Differential Transformer (LVDT) which is employed to actively adjust the height of a rotating seismic disc used in a gyroscope so that the pitch rate induced by Coriolis effect, due to exerted angular excitation, can be accurately measured. That is, the micro-magnetic module acts like an actuator for height regulation on the seismic proof mass by applying appropriate electric current to the primary winding of the LVDT unit. On the other hand, the secondary winding pair of the LVDT acts like a sensor which can detect the gap change, between the seismic rotating disc and the micro-magnetic LVDT module, and the rotation speed (i.e., frequency) by the induced current.

Original languageEnglish
Pages (from-to)1793-1802
Number of pages10
JournalMicrosystem Technologies
Issue number12
Publication statusPublished - 2009 Dec

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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