Abstract
The high-power ultrasonic cleaning system is used in the manufacturing of clean product contaminants. The pulse density modulation (PDM) switching strategy is more efficient for cleaning the rough surface of equipment. This paper proposes a novel pulse density modulation duty cycle stepping (PDMDCS) method that incorporates a proportional–integral–derivative controller and fuzzy logic for the mechanical resonance frequency tracking and PDM duty cycle stepping for ultrasonic cleaning system power control. The experimental results show that based on the same hardware architecture, the proposed PDMDCS method increases the power control range and resolution of power control without adding more hardware that compares to mechanical resonance frequency control method.
Original language | English |
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Pages (from-to) | 1655-1663 |
Number of pages | 9 |
Journal | Microsystem Technologies |
Volume | 27 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2021 Apr |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering