Design of power control for ultrasonic cleaning systems based on hybrid PID/fuzzy methodology

Te Jen Su, Kun Liang Lo, Chia Lin Chung, Jason Sheng Hong Tsai, Jui Chuan Cheng

Research output: Contribution to journalArticlepeer-review


The high-power ultrasonic cleaning system is used in the manufacturing of clean product contaminants. The pulse density modulation (PDM) switching strategy is more efficient for cleaning the rough surface of equipment. This paper proposes a novel pulse density modulation duty cycle stepping (PDMDCS) method that incorporates a proportional–integral–derivative controller and fuzzy logic for the mechanical resonance frequency tracking and PDM duty cycle stepping for ultrasonic cleaning system power control. The experimental results show that based on the same hardware architecture, the proposed PDMDCS method increases the power control range and resolution of power control without adding more hardware that compares to mechanical resonance frequency control method.

Original languageEnglish
Pages (from-to)1655-1663
Number of pages9
JournalMicrosystem Technologies
Issue number4
Publication statusPublished - 2021 Apr

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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