Abstract
Small motion measurement systems are widely used in industry measurement fields to measure small positional/angular motions. These systems usually consist of two parts: a measuring assembly and a reference assembly. The position-sensing detectors (PSDs) are embedded in either measuring assembly or reference assembly to sense the variations of laser light incidence points when there are any small positional/angular motions. To use these systems, it is necessary to determine the linear equations of PSD readings, which relate the six-degrees-of-freedom small positional/angular motions and PSD readings. The purpose of this paper is to derive these equations based on the paraxial raytracing method. Two measurement systems are used as illustrative examples to validate the proposed methodology. The methodology of this study will be useful for system design of PSD-based measurement systems and their applications.
| Original language | English |
|---|---|
| Pages (from-to) | 2480-2487 |
| Number of pages | 8 |
| Journal | Journal of the Optical Society of America A: Optics and Image Science, and Vision |
| Volume | 27 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - 2010 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Computer Vision and Pattern Recognition
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Determination of the linear equations of position-sensing detectors for small motion measurement systems. / Liu, Chien-Sheng; Lin, Psang-Dain.
In: Journal of the Optical Society of America A: Optics and Image Science, and Vision, Vol. 27, No. 11, 2010, p. 2480-2487.Research output: Contribution to journal › Article
TY - JOUR
T1 - Determination of the linear equations of position-sensing detectors for small motion measurement systems
AU - Liu, Chien-Sheng
AU - Lin, Psang-Dain
PY - 2010
Y1 - 2010
N2 - Small motion measurement systems are widely used in industry measurement fields to measure small positional/angular motions. These systems usually consist of two parts: a measuring assembly and a reference assembly. The position-sensing detectors (PSDs) are embedded in either measuring assembly or reference assembly to sense the variations of laser light incidence points when there are any small positional/angular motions. To use these systems, it is necessary to determine the linear equations of PSD readings, which relate the six-degrees-of-freedom small positional/angular motions and PSD readings. The purpose of this paper is to derive these equations based on the paraxial raytracing method. Two measurement systems are used as illustrative examples to validate the proposed methodology. The methodology of this study will be useful for system design of PSD-based measurement systems and their applications.
AB - Small motion measurement systems are widely used in industry measurement fields to measure small positional/angular motions. These systems usually consist of two parts: a measuring assembly and a reference assembly. The position-sensing detectors (PSDs) are embedded in either measuring assembly or reference assembly to sense the variations of laser light incidence points when there are any small positional/angular motions. To use these systems, it is necessary to determine the linear equations of PSD readings, which relate the six-degrees-of-freedom small positional/angular motions and PSD readings. The purpose of this paper is to derive these equations based on the paraxial raytracing method. Two measurement systems are used as illustrative examples to validate the proposed methodology. The methodology of this study will be useful for system design of PSD-based measurement systems and their applications.
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U2 - 10.1364/JOSAA.27.002480
DO - 10.1364/JOSAA.27.002480
M3 - Article
VL - 27
SP - 2480
EP - 2487
JO - Journal of the Optical Society of America A: Optics and Image Science, and Vision
JF - Journal of the Optical Society of America A: Optics and Image Science, and Vision
SN - 1084-7529
IS - 11
ER -