Developing a web-enabled equipment driver for semiconductor equipment communications

Fan Tien Cheng, Meng Tsang Lin, Rong Shean Lee

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)


Equipment communications is essential for semiconductor manufacturing automation. Equipment managers generally function to communicate between the manufacturing execution system (MES) and equipment. To achieve generality and reusability, our previous work developed a generic equipment manager (GEMG). The rules governing the GEMG were divided into three independent portions: system/framework rules, business rules, and equipment rules. These rules were implemented in the MES interface, controller application (CA), and equipment driver (ED) modules, separately. Among them, equipment rules in the ED modules are equipment-dependent. Connecting a different machine to the GEMG requires modifying the associated ED accordingly, which is a difficult task. To solve this problem, this study proposes a novel, web-enabled equipment driver (WED) that uses mobile object technology. Initially, a mobile object model with a Java applet, namely WED, is developed. WED is constructed on the equipment (server) side. Then, the equipment manager (client) downloads WED via a web browser. This process does not need to modify ED. Subsequently, the equipment manager can communicate with the equipment by either the Java socket technology using the HSMS standard or the object web technology through the CORBA or DCOM protocols using the OBEM standard. This proposed scheme has been successfully implemented. Illustrative examples reveal that the proposed mobile object model and WED establish a novel, efficient, and versatile scheme for semiconductor equipment communications.

Original languageEnglish
Pages (from-to)2203-2210
Number of pages8
JournalProceedings - IEEE International Conference on Robotics and Automation
Publication statusPublished - 2000 Dec 3
EventICRA 2000: IEEE International Conference on Robotics and Automation - San Francisco, CA, USA
Duration: 2000 Apr 242000 Apr 28

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering


Dive into the research topics of 'Developing a web-enabled equipment driver for semiconductor equipment communications'. Together they form a unique fingerprint.

Cite this